EP 1494964 A1 20050112 - METHOD FOR THE PRODUCTION OF A MICROSTRUCTURE COMPRISING A VACUUM CAVITY AND MICROSTRUCTURE
Title (en)
METHOD FOR THE PRODUCTION OF A MICROSTRUCTURE COMPRISING A VACUUM CAVITY AND MICROSTRUCTURE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER MIKROSTRUKTUR MIT EINEM VAKUUMHOHLRAUM UND MIKROSTRUKTUR
Title (fr)
PROCEDE DE FABRICATION D UNE MICROSTRUCTURE COMPORTANT UNE C AVITE SOUS VIDE ET MICROSTRUCTURE
Publication
Application
Priority
- FR 0301012 W 20030401
- FR 0204628 A 20020412
Abstract (en)
[origin: FR2838423A1] The fabrication of a microstructure incorporating a cavity under vacuum comprises the following stages: (a) producing, in the thickness of a first silicon plate, of a zone of porous silicon destined to totally or partially make up the wall of the cavity and able to absorb the residual gas of the cavity; and (b) assembling the first silicon plate with a second plate in a manner to produce the cavity. Independent claims are also included for: (a) a microstructure incorporating a cavity under vacuum; and (b) a sensor incorporating such a microstructure.
IPC 1-7
IPC 8 full level
B81B 7/00 (2006.01)
CPC (source: EP US)
B81B 7/0038 (2013.01 - EP US); B81C 2201/0115 (2013.01 - EP US)
Citation (search report)
See references of WO 03086957A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2838423 A1 20031017; FR 2838423 B1 20050624; CA 2482077 A1 20031023; EP 1494964 A1 20050112; US 2005118920 A1 20050602; WO 03086957 A1 20031023
DOCDB simple family (application)
FR 0204628 A 20020412; CA 2482077 A 20030401; EP 03746317 A 20030401; FR 0301012 W 20030401; US 51038504 A 20041006