Global Patent Index - EP 1494964 A1

EP 1494964 A1 20050112 - METHOD FOR THE PRODUCTION OF A MICROSTRUCTURE COMPRISING A VACUUM CAVITY AND MICROSTRUCTURE

Title (en)

METHOD FOR THE PRODUCTION OF A MICROSTRUCTURE COMPRISING A VACUUM CAVITY AND MICROSTRUCTURE

Title (de)

VERFAHREN ZUR HERSTELLUNG EINER MIKROSTRUKTUR MIT EINEM VAKUUMHOHLRAUM UND MIKROSTRUKTUR

Title (fr)

PROCEDE DE FABRICATION D UNE MICROSTRUCTURE COMPORTANT UNE C AVITE SOUS VIDE ET MICROSTRUCTURE

Publication

EP 1494964 A1 20050112 (FR)

Application

EP 03746317 A 20030401

Priority

  • FR 0301012 W 20030401
  • FR 0204628 A 20020412

Abstract (en)

[origin: FR2838423A1] The fabrication of a microstructure incorporating a cavity under vacuum comprises the following stages: (a) producing, in the thickness of a first silicon plate, of a zone of porous silicon destined to totally or partially make up the wall of the cavity and able to absorb the residual gas of the cavity; and (b) assembling the first silicon plate with a second plate in a manner to produce the cavity. Independent claims are also included for: (a) a microstructure incorporating a cavity under vacuum; and (b) a sensor incorporating such a microstructure.

IPC 1-7

B81B 7/00

IPC 8 full level

B81B 7/00 (2006.01)

CPC (source: EP)

B81B 7/0038 (2013.01); B81C 2201/0115 (2013.01)

Citation (search report)

See references of WO 03086957A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DOCDB simple family (publication)

FR 2838423 A1 20031017; FR 2838423 B1 20050624; CA 2482077 A1 20031023; EP 1494964 A1 20050112; US 2005118920 A1 20050602; WO 03086957 A1 20031023

DOCDB simple family (application)

FR 0204628 A 20020412; CA 2482077 A 20030401; EP 03746317 A 20030401; FR 0301012 W 20030401; US 51038504 A 20041006