EP 1495304 A1 20050112 - SURFACE CLEANING AND PARTICLE COUNTING
Title (en)
SURFACE CLEANING AND PARTICLE COUNTING
Title (de)
OBERFLÄCHENREINIGEN UND PARTIKELZÄHLEN
Title (fr)
NETTOYAGE DE SURFACE ET COMPTAGE DES PARTICULES
Publication
Application
Priority
US 0210564 W 20020401
IPC 1-7
IPC 8 full level
G01N 1/02 (2006.01); G01N 15/02 (2006.01); G01N 15/10 (2006.01); G01N 15/14 (2006.01)
CPC (source: EP KR)
B08B 7/0028 (2013.01 - EP); G01N 15/10 (2013.01 - KR); G01N 15/14 (2013.01 - KR); G01N 21/88 (2013.01 - EP); G01N 21/94 (2013.01 - EP); G01N 2001/028 (2013.01 - EP); H01L 21/67288 (2013.01 - EP)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
AU 2002303238 A1 20031020; EP 1495304 A1 20050112; EP 1495304 A4 20091118; JP 2005521886 A 20050721; JP 4099454 B2 20080611; KR 100730013 B1 20070620; KR 20050009289 A 20050124
DOCDB simple family (application)
AU 2002303238 A 20020401; EP 02731253 A 20020401; JP 2003582524 A 20020401; KR 20047015649 A 20020401