EP 1495369 A2 20050112 - INTERFEROMETRIC MEASURING DEVICE AND PROJECTION ILLUMINATION INSTALLATION COMPRISING ONE SUCH MEASURING DEVICE
Title (en)
INTERFEROMETRIC MEASURING DEVICE AND PROJECTION ILLUMINATION INSTALLATION COMPRISING ONE SUCH MEASURING DEVICE
Title (de)
INTERFEROMETRISCHE MESSVORRICHTUNG UND PROJEKTIONSBELICHTUNGSANLAGE MIT DERARTIGER MESSVORRICHTUNG
Title (fr)
DISPOSITIF DE MESURE INTERFEROMETRIQUE ET INSTALLATION D'ECLAIRAGE DE PROJECTION POURVUE D'UN DISPOSITIF DE MESURE DE CE TYPE
Publication
Application
Priority
- DE 10217242 A 20020415
- EP 0303566 W 20030405
Abstract (en)
[origin: WO03087945A2] The invention relates to a device for the interferometric measurement of an optical imaging system which is used to image a useful model provided on a mask in the image plane of said imaging system. Said measuring device has a wave front source for producing at least one wave front which passes through the imaging system, a diffraction grid which can be arranged behind the imaging system in order to interact with the wave front which is modified by the imaging system, and a spatially resolving detector which is associated with the diffraction grid and is used to detect interferometric information. The wave front source comprises at least one measuring model (34) which is embodied on the mask (8) along with the useful model (35).
IPC 1-7
IPC 8 full level
G01B 9/02 (2006.01); G02B 5/02 (2006.01); G03F 1/08 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP US)
G02B 5/0221 (2013.01 - EP US); G02B 5/0252 (2013.01 - EP US); G03F 7/70075 (2013.01 - EP US); G03F 7/706 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03087945 A2 20031023; WO 03087945 A3 20040916; AU 2003222799 A1 20031027; AU 2003222799 A8 20031027; DE 10317278 A1 20031106; EP 1495369 A2 20050112; JP 2005522871 A 20050728; US 2005264827 A1 20051201; US 2007046912 A1 20070301; US 7158237 B2 20070102
DOCDB simple family (application)
EP 0303566 W 20030405; AU 2003222799 A 20030405; DE 10317278 A 20030411; EP 03718735 A 20030405; JP 2003584827 A 20030405; US 46978606 A 20060901; US 96486804 A 20041015