EP 1495370 A2 20050112 - METHOD FOR PRODUCING A MASK ADAPTED TO A LIGHTING DEVICE
Title (en)
METHOD FOR PRODUCING A MASK ADAPTED TO A LIGHTING DEVICE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER AUF EIN BELICHTUNGSGERÄT ANGEPASSTEN MASKE
Title (fr)
PROCEDE DE PRODUCTION D'UN MASQUE ADAPTE A UN APPAREIL D'ECLAIRAGE
Publication
Application
Priority
- DE 0301280 W 20030416
- DE 10216820 A 20020416
Abstract (en)
[origin: WO03087943A2] Information about the respective positions (501, 502, 601, 602) of at least two structural elements (50, 60) on a mask is provided. The displacement of the positions caused by lens aberration during reproduction of the lens system of the lighting device is measured, and correction values (540, 640) are determined for each of the structural elements. By using the correct values (540, 640), the positions (501, 502, 601, 602) are altered in order to form new positions (505, 506, 605, 606) of the structure elements (50, 60) so that the aberration effects can be compensated. A mask (40) which is adapted to the lighting device is illuminated with the structures placed in the altered positions. The scattering caused by the aberration of the lenses in the precise positions and the structural width distributions is advantageously reduced.
IPC 1-7
IPC 8 full level
G03F 7/20 (2006.01)
CPC (source: EP)
G03F 7/70433 (2013.01); G03F 7/70591 (2013.01); G03F 7/706 (2013.01); G03F 7/70783 (2013.01)
Citation (search report)
See references of WO 03087943A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03087943 A2 20031023; WO 03087943 A3 20040304; DE 10216820 A1 20031106; EP 1495370 A2 20050112; TW 200305775 A 20031101; TW I238288 B 20050821
DOCDB simple family (application)
DE 0301280 W 20030416; DE 10216820 A 20020416; EP 03729841 A 20030416; TW 92106236 A 20030320