EP 1495482 A2 20050112 - COMPLEX MICRODEVICES AND APPPARATUS AND METHODS FOR FABRICATING SUCH DEVICES
Title (en)
COMPLEX MICRODEVICES AND APPPARATUS AND METHODS FOR FABRICATING SUCH DEVICES
Title (de)
KOMPLEXE MIKROEINRICHTUNGEN UND VORRICHTUNGEN UND VERFAHREN ZUR HERSTELLUNG SOLCHER EINRICHTUNGEN
Title (fr)
MICRODISPOSITIFS COMPLEXES, APPAREIL ET PROCEDES DE FABRICATION DE CEUX-CI
Publication
Application
Priority
- US 0239146 W 20021206
- US 34037201 P 20011206
- US 36426102 P 20020313
- US 37913302 P 20020507
- US 37918402 P 20020507
- US 37913502 P 20020507
- US 37917702 P 20020507
- US 37918202 P 20020507
- US 37913002 P 20020507
- US 39253102 P 20020627
- US 41537402 P 20021001
- US 41537102 P 20021001
- US 42200702 P 20021029
- US 42298202 P 20021101
- US 42948302 P 20021126
- US 42948402 P 20021126
- US 43080902 P 20021203
- US 30952102 A 20021203
Abstract (en)
[origin: WO03050852A2] Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication EFAB TM
[origin: WO03050852A2] Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB <sp>TM</sp>)
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01); H01P 3/06 (2006.01); H01P 5/18 (2006.01); H01P 11/00 (2006.01)
CPC (source: EP)
B81B 7/02 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); H01P 3/06 (2013.01); H01P 5/183 (2013.01); H01P 11/00 (2013.01); H01P 11/005 (2013.01); B81B 2201/042 (2013.01)
Citation (search report)
See references of WO 03050852A2
Citation (examination)
BARRON C.C. ET AL: "Micromachined Silicon Seismic Accelerometer Development", CONFERENCE: 18. SEISMIC RESEARCH SYMPOSIUM ON MONITORING A COMPREHENSIVE TEST BAND TREATY (CTBT), ANNAPOLIS, MD (UNITED STATES), 4-6 SEP 1996, 30 July 1996 (1996-07-30), SANDIA NATIONAL LABORATORIES, ALBUQUERQUE, NM, USA
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03050852 A2 20030619; WO 03050852 A3 20041111; AU 2002351289 A1 20030623; EP 1495482 A2 20050112
DOCDB simple family (application)
US 0239146 W 20021206; AU 2002351289 A 20021206; EP 02786937 A 20021206