EP 1498612 A2 20050119 - Turbo molecular pump
Title (en)
Turbo molecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbomoléculaire
Publication
Application
Priority
DE 10331932 A 20030715
Abstract (en)
The turbomolecular pump has rotor and stator discs (14,16) arranged to alternate and interacting to create a pumping effect. The stator discs are spaced apart by distance rings (18,19) which are designed so that they form a fixed connection with the respective adjacent ring so that they undertake in their entirety the fixing and centering of the stator discs. The fixed connection between the distance rings is created by a screw thread or clip lock fastening .
Abstract (de)
Die Erfindung betrifft eine Turbomolekularpumpe mit Rotor- (14) und Statorscheiben (16), wobei die Statorscheiben durch Distanzringe (18, 19) auf Abstand gehalten werden. Die Distanzringe sind so gestaltet, dass sie eine feste Verbindung mit dem jeweiligen Nachbarring eingehen, so dass sie in ihrer Gesamtheit die Fixierung und Zentrierung der Statorscheiben übernehmen.
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/54 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 29/542 (2013.01 - EP US)
Citation (applicant)
- DE 3722164 A1 19890112 - PFEIFFER VAKUUMTECHNIK [DE]
- DE 19951954 A1 20010503 - PFEIFFER VACUUM GMBH [DE]
- US 2001016160 A1 20010823 - IKEGAMI TETSUMA [JP], et al
- JP H04330397 A 19921118 - FUJITSU LTD
- DE 2523390 B1 19760513 - PFEIFFER VAKUUMTECHNIK [DE]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL HR LT LV MK
DOCDB simple family (publication)
EP 1498612 A2 20050119; EP 1498612 A3 20110914; EP 1498612 B1 20150729; DE 10331932 A1 20050203; DE 10331932 B4 20170824; JP 2005036798 A 20050210; US 2005013710 A1 20050120; US 7278822 B2 20071009
DOCDB simple family (application)
EP 04014174 A 20040617; DE 10331932 A 20030715; JP 2004164365 A 20040602; US 89073004 A 20040714