EP 1499926 A1 20050126 - METHOD FOR PRODUCING MICROHOLE STRUCTURES
Title (en)
METHOD FOR PRODUCING MICROHOLE STRUCTURES
Title (de)
VERFAHREN ZUM HERSTELLEN VON MIKROLOCHSTRUKTUREN
Title (fr)
PROCEDE DE PRODUCTION DE STRUCTURES A MICRO-TROUS
Publication
Application
Priority
- DE 10219584 A 20020426
- EP 0304321 W 20030425
Abstract (en)
[origin: WO03091804A1] The invention relates to a novel method for producing microhole structures. According to said method, the material used to produce said microhole structures is applied to a substrate surface provided with a relief structure, by means of an angular coating process. In order to achieve the desired pattern of holes, the relief structure has a continuous network of first surface elements and second surface elements located thereinbetween, the local surface normal vectors of the first surface elements forming a small angle with the unit vector, and the local surface normal vectors of the second surface elements forming a small angle with the direction vector of the coating.
IPC 1-7
IPC 8 full level
B01D 67/00 (2006.01); B01D 69/10 (2006.01); B01D 71/02 (2006.01); G03F 7/00 (2006.01)
CPC (source: EP US)
B01D 67/003 (2013.01 - EP US); B01D 69/107 (2022.08 - EP US); B01D 71/022 (2013.01 - EP US); G03F 7/0015 (2013.01 - EP US); B01D 2323/24 (2013.01 - EP US); B01D 2325/44 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03091804 A1 20031106; DE 10219584 A1 20031120; EP 1499926 A1 20050126; US 2005214692 A1 20050929
DOCDB simple family (application)
EP 0304321 W 20030425; DE 10219584 A 20020426; EP 03725097 A 20030425; US 51260105 A 20050531