EP 1502132 A1 20050202 - METHOD FOR PRODUCING AN OPTICAL ELEMENT FROM A QUARTZ SUBSTRATE
Title (en)
METHOD FOR PRODUCING AN OPTICAL ELEMENT FROM A QUARTZ SUBSTRATE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES OPTISCHEN ELEMENTES AUS QUARZSUBSTRAT
Title (fr)
PROCEDE ET PRODUCTION D'UN ELEMENT OPTIQUE EN SUBSTRAT EN QUARZ
Publication
Application
Priority
- DE 10220045 A 20020504
- EP 0304043 W 20030417
Abstract (en)
[origin: WO03093880A1] The invention relates to a method for producing an optical element from a quartz substrate for illuminating systems having illumination sources that emit beams having a wavelength of 157 nm or shorter. According to the invention, the quartz substrate (9) is joined to a supporting body (11) on at least one side. Afterwards, material is removed from the quartz substrate (9) until obtaining a set value with a thickness on the scale of microns µ. The optical element can be a diffractive optical element or a diffusing disc.
IPC 1-7
IPC 8 full level
G02B 5/18 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP US)
G02B 5/1838 (2013.01 - EP US); G02B 5/1857 (2013.01 - EP US); G03F 7/70075 (2013.01 - EP US); G03F 7/70158 (2013.01 - EP US); G03F 7/70958 (2013.01 - EP US)
Citation (search report)
See references of WO 03093880A1
Citation (examination)
DE 10119861 A1 20011108 - ZEISS CARL [DE]
Designated contracting state (EPC)
DE NL
DOCDB simple family (publication)
WO 03093880 A1 20031113; AU 2003227646 A1 20031117; DE 10220045 A1 20031113; EP 1502132 A1 20050202; JP 2005524862 A 20050818; US 2004021843 A1 20040205; US 2005117203 A1 20050602
DOCDB simple family (application)
EP 0304043 W 20030417; AU 2003227646 A 20030417; DE 10220045 A 20020504; EP 03725056 A 20030417; JP 2004502043 A 20030417; US 42381303 A 20030425; US 98548804 A 20041110