EP 1506448 A2 20050216 - OPTICAL SYSTEM FOR HOMOGENIZING AN AT LEAST PARTIALLY COHERENT LIGHT FIELD
Title (en)
OPTICAL SYSTEM FOR HOMOGENIZING AN AT LEAST PARTIALLY COHERENT LIGHT FIELD
Title (de)
OPTISCHE ANORDNUNG ZUR HOMOGENISIERUNG EINES ZUMINDEST TEILWEISE KOH RENTEN LICHTFELDES
Title (fr)
SYSTEME OPTIQUE POUR HOMOGENEISER UN CHAMP LUMINEUX AU MOINS PARTIELLEMENT COHERENT
Publication
Application
Priority
- DE 10223106 A 20020522
- DE 10322806 A 20030516
- EP 0305275 W 20030520
Abstract (en)
[origin: WO03098316A2] The invention relates to an optical system for homogenizing an at least partially coherent light field, especially one emitted by a laser, preferably by an excimer laser. The optical system according to the invention essentially comprises an optical cycle, at least one coupling element for coupling a light field into the optical cycle and at least one decoupling element. The light field (1) or a portion of said light field (1) coupled into the cycle repeatedly passes the optical cycle, thereby at least partially deforming the wave front of the light field (1). Portions of the light field (1) are coupled out when they have passed the optical cycle once or several times. The light field (1) is coupled into the optical cycle with a predetermined wave front. During the repeated passage of the optical cycle, portions of the light field (1) whose wave fronts deviate from one another are coupled out of the cycle. If the laser radiation is pulsed, the distances across which the individual portions of the light field travel are longer than the temporal coherence length.
IPC 1-7
IPC 8 full level
G02B 27/48 (2006.01)
CPC (source: EP)
G02B 27/48 (2013.01)
Citation (search report)
See references of WO 03098316A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03098316 A2 20031127; WO 03098316 A3 20040916; EP 1506448 A2 20050216
DOCDB simple family (application)
EP 0305275 W 20030520; EP 03752770 A 20030520