EP 1506699 A2 20050216 - METHOD AND DEVICE FOR GENERATING AN ACTIVATED GAS CURTAIN FOR SURFACE TREATMENT
Title (en)
METHOD AND DEVICE FOR GENERATING AN ACTIVATED GAS CURTAIN FOR SURFACE TREATMENT
Title (de)
VERFAHREN UND EINRICHTUNG ZUR ERZEUGUNG EINES VORHANGS AUS AKTIVIERTEM GAS FÜR DIE OBERFLÄCHENBEHANDLUNG
Title (fr)
PROCEDE ET DISPOSITIF DE GENERATION D'UN RIDEAU DE GAZ ACTIVE POUR TRAITEMENT DE SURFACE
Publication
Application
Priority
- EP 02769174 A 20020503
- EP 01810433 A 20010503
- IB 0201482 W 20020503
Abstract (en)
[origin: WO02091809A2] The invention relates to a surface treatment device comprising: electrodes (24a, 24b) that are used to initiate an electric arc of stabilised plasma (14); a stabilising channel (12) which is disposed in a body (10) in order to confine the electric arc of stabilised plasma; conduits (38, 39) which are disposed in the body and used to introduce a treatment gas Q1, uniformly distributed along the arc, upstream of the arc in a direction that is essentially perpendicular to axis A of said arc in such a way as to form an activated gas curtain (8); means for introducing a complementary treatment gas Q2 downstream of the electric arc; and a support (28) that is used to hold the object or material to be treated in place and to position the object or material surface to be treated in relation to the body (10).
IPC 1-7
IPC 8 full level
H05H 1/48 (2006.01); H01L 21/3065 (2006.01); H01L 21/31 (2006.01); H01L 21/316 (2006.01); H05H 1/24 (2006.01)
CPC (source: EP US)
H05H 1/484 (2021.05 - EP US); H05H 2245/40 (2021.05 - EP US)
Citation (search report)
See references of WO 02091809A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02091809 A2 20021114; WO 02091809 A3 20041223; WO 02091809 A8 20040401; EP 1506699 A2 20050216; JP 2005505098 A 20050217; JP 4313046 B2 20090812; US 2004115872 A1 20040617; US 7214413 B2 20070508
DOCDB simple family (application)
IB 0201482 W 20020503; EP 02769174 A 20020503; JP 2002588733 A 20020503; US 47466903 A 20031014