EP 1513603 A1 20050316 - INTEGRATED PHOTOCHEMICAL TREATMENT OF GASES
Title (en)
INTEGRATED PHOTOCHEMICAL TREATMENT OF GASES
Title (de)
INTEGRIERTE PHOTOCHEMISCHE BEHANDLUNG VON GASEN
Title (fr)
TRAITEMENT PHOTOCHIMIQUE INTEGRE DES GAZ
Publication
Application
Priority
- FR 0301635 W 20030530
- FR 0206639 A 20020530
Abstract (en)
[origin: WO03101590A1] The invention relates to the integrated photochemical treatment of gases. According to the invention, at least one excimer lamp (7) is positioned at the outlet of a treatment chamber (9), said lamp emitting far-ultraviolet radiation in the streams (10) of gaseous effluents for the purpose of dissociation by means of a photochemical reaction. In this way, gases and vapours containing, in particular, solvents such as isopropyl alcohol, acetone, n-methyl pyrrolidone are dissociated into carbon dioxide gas and water or other elements without the need for dilution, and in a smaller, easily-integrated device.
IPC 1-7
IPC 8 full level
G03F 7/20 (2006.01); B01D 53/00 (2006.01); B01D 53/72 (2006.01); B01J 19/12 (2006.01); H01L 21/027 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP)
B01D 53/007 (2013.01); B01D 2259/804 (2013.01)
Citation (search report)
See references of WO 03101590A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03101590 A1 20031211; EP 1513603 A1 20050316; JP 2005527369 A 20050915
DOCDB simple family (application)
FR 0301635 W 20030530; EP 03756030 A 20030530; JP 2004508934 A 20030530