EP 1514158 A1 20050316 - DEVICE FOR POSITIONING AN OPTICAL ELEMENT IN A STRUCTURE
Title (en)
DEVICE FOR POSITIONING AN OPTICAL ELEMENT IN A STRUCTURE
Title (de)
VORRICHTUNG ZUR POSITIONIERUNG EINES OPTISCHEN ELEMENTES IN EINER STRUKTUR
Title (fr)
DISPOSITIF PERMETTANT DE POSITIONNER UN ELEMENT OPTIQUE DANS UNE STRUCTURE
Publication
Application
Priority
- DE 10226655 A 20020614
- EP 0306015 W 20030607
Abstract (en)
[origin: US2003231412A1] In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction
IPC 1-7
IPC 8 full level
G02B 7/18 (2006.01); G02B 7/00 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP US)
G02B 7/003 (2013.01 - EP US); G03F 7/70258 (2013.01 - EP US); G03F 7/70825 (2013.01 - EP US)
Citation (search report)
See references of WO 03107095A1
Designated contracting state (EPC)
DE NL
DOCDB simple family (publication)
US 2003231412 A1 20031218; US 6967792 B2 20051122; AU 2003242653 A1 20031231; DE 10226655 A1 20040108; EP 1514158 A1 20050316; JP 2005530339 A 20051006; JP 4484698 B2 20100616; US 2006072217 A1 20060406; US 7251086 B2 20070731; WO 03107095 A1 20031224
DOCDB simple family (application)
US 45896803 A 20030611; AU 2003242653 A 20030607; DE 10226655 A 20020614; EP 0306015 W 20030607; EP 03759921 A 20030607; JP 2004513848 A 20030607; US 26236005 A 20051028