EP 1514303 A2 20050316 - LAYER ASSEMBLY AND METHOD FOR PRODUCING A LAYER ASSEMBLY
Title (en)
LAYER ASSEMBLY AND METHOD FOR PRODUCING A LAYER ASSEMBLY
Title (de)
SCHICHT-ANORDNUNG UND VERFAHREN ZUM HERSTELLEN EINER SCHICHT-ANORDNUNG
Title (fr)
DISPOSITIF EN COUCHES ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- DE 0301827 W 20030603
- DE 10227615 A 20020620
Abstract (en)
[origin: WO2004001842A2] The invention relates to a layer assembly and to a method for producing a layer assembly. This layer assembly comprises a layer that is placed on a substrate. Said layer comprises a first partial region, which is made of a decomposable material, and an adjacent second partial region with a useful structure made of a non-decomposable material. The layer assembly also has a top layer which is arranged on the layer made of a decomposable material and the useful structure. The layer assembly is designed so that the decomposable material can be removed from the layer assembly.
IPC 1-7
IPC 8 full level
H01L 21/312 (2006.01); H01L 21/768 (2006.01); H01L 23/522 (2006.01)
CPC (source: EP US)
H01L 21/768 (2013.01 - EP US); H01L 21/7682 (2013.01 - EP US); H01L 23/5222 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US)
Citation (search report)
See references of WO 2004001842A2
Citation (examination)
US 5695810 A 19971209 - DUBIN VALERY M [US], et al
Designated contracting state (EPC)
DE FR
DOCDB simple family (publication)
WO 2004001842 A2 20031231; WO 2004001842 A3 20040311; CN 100349280 C 20071114; CN 1663040 A 20050831; DE 10227615 A1 20040115; EP 1514303 A2 20050316; JP 2005534168 A 20051110; TW 200400561 A 20040101; TW I222137 B 20041011; US 2006014374 A1 20060119
DOCDB simple family (application)
DE 0301827 W 20030603; CN 03813829 A 20030603; DE 10227615 A 20020620; EP 03760551 A 20030603; JP 2004514543 A 20030603; TW 92115466 A 20030606; US 51888005 A 20050808