EP 1516166 A1 20050323 - TEMPERATURE SENSOR AND METHOD FOR PRODUCTION THEREOF
Title (en)
TEMPERATURE SENSOR AND METHOD FOR PRODUCTION THEREOF
Title (de)
TEMPERATURSENSOR UND VERFAHREN ZU DESSEN HERSTELLUNG
Title (fr)
CAPTEUR DE TEMPERATURE ET PROCEDE DE FABRICATION DUDIT CAPTEUR
Publication
Application
Priority
- DE 0300427 W 20030213
- DE 10219247 A 20020430
Abstract (en)
[origin: WO03093778A1] A temperature sensor of durable construction is disclosed, which may be simply installed and packaged, is uncomplicated to produce and with which rapid changes in temperature may be reliably recorded. The temperature sensor (1) comprises a silicon substrate (2) in which at least one porous region (3) is embodied, whereby the degree of porosity and the thickness of the porous region (3) is selected such that the porous region (3) is thermally decoupled from the silicon substrate (2). The temperature sensor (1) further comprises temperature measuring elements (6, 7), for recording the temperature difference between the silicon substrate (2) and the porous region (3). The temperature sensor can furthermore comprise heating means for testing the sensor function.
IPC 1-7
IPC 8 full level
G01K 7/02 (2006.01); G01K 7/18 (2006.01); H01L 37/00 (2006.01)
CPC (source: EP US)
G01K 7/186 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03093778 A1 20031113; DE 10219247 A1 20031218; EP 1516166 A1 20050323; JP 2005524080 A 20050811; US 2004169579 A1 20040902
DOCDB simple family (application)
DE 0300427 W 20030213; DE 10219247 A 20020430; EP 03742855 A 20030213; JP 2004501894 A 20030213; US 48128703 A 20031219