EP 1516167 A1 20050323 - SENSOR AND METHOD FOR PRODUCING A SENSOR
Title (en)
SENSOR AND METHOD FOR PRODUCING A SENSOR
Title (de)
SENSOR UND VERFAHREN ZUR HERSTELLUNG EINES SENSORS
Title (fr)
DETECTEUR ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- DE 0300422 W 20030213
- DE 10226034 A 20020612
Abstract (en)
[origin: WO03106955A1] The invention relates to a sensor, which is suitable for measuring high pressure and a method for producing said sensor. According to said method, a cavity (500) with a high aspect ratio is configured in a semiconductor material (51).
IPC 1-7
IPC 8 full level
G01L 9/00 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01L 9/02 (2006.01); H01L 29/84 (2006.01)
CPC (source: EP)
G01L 9/0042 (2013.01); G01L 19/147 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48472 (2013.01)
Citation (search report)
See references of WO 03106955A1
Designated contracting state (EPC)
DE FR IT
DOCDB simple family (publication)
DE 10226034 A1 20031224; EP 1516167 A1 20050323; JP 2005529347 A 20050929; WO 03106955 A1 20031224
DOCDB simple family (application)
DE 10226034 A 20020612; DE 0300422 W 20030213; EP 03759809 A 20030213; JP 2004513726 A 20030213