EP 1516195 A1 20050323 - ELECTROMIGRATION TEST DEVICE AND ELECTROMIGRATION TEST METHOD
Title (en)
ELECTROMIGRATION TEST DEVICE AND ELECTROMIGRATION TEST METHOD
Title (de)
ELEKTROMIGRATIONS-TESTVORRICHTUNG UND ELEKTROMIGRATIONS-TESTVERFAHREN
Title (fr)
DISPOSITIF DE TEST D'ELECTROMIGRATION ET PROCEDE ASSOCIE
Publication
Application
Priority
- DE 0302112 W 20030625
- DE 10228284 A 20020625
Abstract (en)
[origin: WO2004001432A1] The invention relates to an electromigration test device comprising a direct-current source (101) and an alternating voltage source (102). Said device also comprises a circuit (104) which has a conductive structure (100) and is electrically coupled to the direct-current source (101) and to the alternating voltage source (102), and a measuring device for measuring an electrical parameter which indicates electromigration in the conductive structure. The alternating voltage source (102) is controlled in such a way that it subjects the conductive structure (100) to an alternating current, independently of a direct current, thus heating the conductive structure (100 to a pre-determined temperature.
IPC 1-7
IPC 8 full level
G01R 31/28 (2006.01); G01R 31/02 (2006.01); G01R 31/26 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP US)
G01R 31/2648 (2013.01 - EP US); G01R 31/2858 (2013.01 - EP US); G01R 31/2853 (2013.01 - EP US)
Citation (search report)
See references of WO 2004001432A1
Designated contracting state (EPC)
DE FR
DOCDB simple family (publication)
WO 2004001432 A1 20031231; CN 100412561 C 20080820; CN 1662823 A 20050831; EP 1516195 A1 20050323; JP 2005536871 A 20051202; TW 200403441 A 20040301; TW I221908 B 20041011; US 2006125494 A1 20060615
DOCDB simple family (application)
DE 0302112 W 20030625; CN 03814804 A 20030625; EP 03740110 A 20030625; JP 2004514570 A 20030625; TW 92116720 A 20030619; US 51965905 A 20051219