Global Patent Index - EP 1516854 A4

EP 1516854 A4 20070711 - PROCESS FOR PRODUCING OXIDE SUPERCONDUCTIVE THIN-FILM

Title (en)

PROCESS FOR PRODUCING OXIDE SUPERCONDUCTIVE THIN-FILM

Title (de)

VERFAHREN ZUR HERSTELLUNG VON SUPRALEITENDEM OXID-DÜNNFILM

Title (fr)

PROCEDE DE PRODUCTION DE COUCHE MINCE D'OXYDE SUPERCONDUCTRICE

Publication

EP 1516854 A4 20070711 (EN)

Application

EP 03719132 A 20030417

Priority

  • JP 0304932 W 20030417
  • JP 2002125380 A 20020426

Abstract (en)

[origin: EP1516854A1] Provided is a method of producing an oxide superconducting film on a single-crystal substrate by depositing, on the single-crystal substrate, substances scattered from a raw material due to irradiation with laser beams according to a pulsed-laser deposition method, wherein the irradiation of the raw material is performed in a manner such that the repetition frequency of the pulse irradiation of the laser beams is divided into at least two steps. Thus, an oxide superconducting film having a high critical current density can be produced by the method. <IMAGE>

IPC 8 full level

H01L 39/24 (2006.01); C01G 1/00 (2006.01); C01G 3/00 (2006.01); C23C 14/08 (2006.01); C23C 14/22 (2006.01); C23C 14/28 (2006.01); H01B 12/06 (2006.01); H01B 13/00 (2006.01)

CPC (source: EP KR US)

C01G 1/00 (2013.01 - KR); C01G 1/02 (2013.01 - KR); C01G 3/00 (2013.01 - KR); C23C 14/08 (2013.01 - KR); C23C 14/087 (2013.01 - EP US); C23C 14/225 (2013.01 - EP US); C23C 14/28 (2013.01 - EP US); H10N 60/0521 (2023.02 - EP US)

Citation (search report)

  • [A] US 5206212 A 19930427 - OKUDA SHIGERU [JP]
  • [A] DAM B ET AL: "The transition from 2D-nucleation to spiral growth in pulsed laser deposited YBa2Cu3O7-delta films", PHYSICA C, NORTH-HOLLAND PUBLISHING, AMSTERDAM, NL, vol. 305, no. 1-2, September 1998 (1998-09-01), pages 1 - 10, XP004142507, ISSN: 0921-4534
  • [A] NORTON M G ET AL: "ON THE OPTIMIZATION OF THE LASER ABLATION PROCESS FOR THE DEPOSITION OF YBA2CU3O7- THIN FILMS", PHYSICA C, NORTH-HOLLAND PUBLISHING, AMSTERDAM, NL, vol. 172, no. 1 / 2, 1 December 1990 (1990-12-01), pages 47 - 56, XP000243732, ISSN: 0921-4534
  • [A] COTELL C M ET AL: "Microstructural development of thin films grown by pulsed laser deposition", MATERIALS SCIENCE AND ENGINEERING B, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 32, no. 3, 1 July 1995 (1995-07-01), pages 221 - 230, XP002297626, ISSN: 0921-5107
  • [A] FOLTYN S R ET AL: "PULSED LASER DEPOSITION OF THICK YBA2CU3O7- FILMS WITH JC>1 MA/CM2", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 63, no. 13, 27 September 1993 (1993-09-27), pages 1848 - 1850, XP000397802, ISSN: 0003-6951
  • See references of WO 03091157A1

Designated contracting state (EPC)

DE DK FR GB IT

DOCDB simple family (publication)

EP 1516854 A1 20050323; EP 1516854 A4 20070711; AU 2003235235 A1 20031110; AU 2003235235 B2 20071025; CN 100379684 C 20080409; CN 1649794 A 20050803; JP WO2003091157 A1 20050902; KR 20040105244 A 20041214; US 2005176585 A1 20050811; WO 03091157 A1 20031106

DOCDB simple family (application)

EP 03719132 A 20030417; AU 2003235235 A 20030417; CN 03809275 A 20030417; JP 0304932 W 20030417; JP 2003587731 A 20030417; KR 20047017178 A 20030417; US 51126804 A 20041020