EP 1520210 A2 20050406 - OPTICAL DEVICE COMPRISING AN LIGHT SOURCE
Title (en)
OPTICAL DEVICE COMPRISING AN LIGHT SOURCE
Title (de)
OPTISCHE VORRICHTUNG MIT EINER BELEUCHTUNGSQUELLE
Title (fr)
DISPOSITIF OPTIQUE COMPORTANT UNE SOURCE D'ECLAIRAGE
Publication
Application
Priority
- DE 10230652 A 20020708
- EP 0306397 W 20030618
Abstract (en)
[origin: WO2004006021A2] The invention relates to an optical device for illuminating an object of which an image should be formed with the aid of corresponding optics. The inventive device comprises a light source (210), which is arranged in the vicinity of or in an pupillary plane of illuminating optics and which produces an illuminating light beam. The illuminating optics are placed between the light source (210) and the object. The illuminating light beam used during an illumination cycle is composed of a number individual beams in two dimensions and in a matrix-like manner. The inventive device also comprises a control device (220) for selectively producing (216, 217) the individual beams. The selection ensues in such a manner that the shape of the illuminating light beam can be predetermined by the respectively produced individual beams. This enables the rapid and variable adjustment of illumination settings adapted to the respective imaging requirements.
IPC 1-7
IPC 8 full level
G02B 19/00 (2006.01); G02B 27/00 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP US)
G03F 7/70116 (2013.01 - EP US); G03F 7/70141 (2013.01 - EP US)
Citation (search report)
See references of WO 2004006021A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004006021 A2 20040115; WO 2004006021 A3 20040916; AU 2003246548 A1 20040123; CN 1666153 A 20050907; DE 10230652 A1 20040129; EP 1520210 A2 20050406; JP 2005532680 A 20051027; US 2005226000 A1 20051013
DOCDB simple family (application)
EP 0306397 W 20030618; AU 2003246548 A 20030618; CN 03816145 A 20030618; DE 10230652 A 20020708; EP 03762496 A 20030618; JP 2004518539 A 20030618; US 1737504 A 20041220