EP 1521797 A4 20061220 - ANTIREFLECTIVE SILICON-CONTAINING COMPOSITIONS AS HARDMASK LAYER
Title (en)
ANTIREFLECTIVE SILICON-CONTAINING COMPOSITIONS AS HARDMASK LAYER
Title (de)
ANTIREFLEKTIVE SILICIUMHALTIGE ZUSAMMENSETZUNGEN ALS HARTMASKENSCHICHT
Title (fr)
COMPOSITIONS ANTIREFLET CONTENANT DU SILICIUM POUR COUCHE DE MASQUE DUR
Publication
Application
Priority
US 0222176 W 20020711
IPC 8 full level
C08G 77/04 (2006.01); C08K 5/00 (2006.01); B05D 5/00 (2006.01); B32B 9/04 (2006.01); C08G 77/14 (2006.01); C08G 77/38 (2006.01); C08J 7/18 (2006.01); C08L 83/04 (2006.01); C08L 83/06 (2006.01); G03C 1/76 (2006.01); G03F 7/075 (2006.01); G03F 7/09 (2006.01); H01L 21/312 (2006.01); H01L 21/3213 (2006.01); C08K 5/34 (2006.01); C08K 5/42 (2006.01)
CPC (source: EP)
C08G 77/04 (2013.01); C08G 77/38 (2013.01); C08L 83/04 (2013.01); C08L 83/06 (2013.01); C09D 183/04 (2013.01); G03F 7/0752 (2013.01); G03F 7/091 (2013.01); C08K 5/3445 (2013.01); C08K 5/42 (2013.01)
Citation (search report)
- [E] WO 03089992 A1 20031030 - IBM [US]
- [E] WO 02091083 A1 20021114 - SHIPLEY CO LLC [US]
- [Y] EP 1061560 A2 20001220 - SHIPLEY CO LLC [US]
- [Y] US 2002042020 A1 20020411 - GALLAGHER MICHAEL K [US], et al
- [Y] WO 0077575 A1 20001221 - ALLIED SIGNAL INC [US]
- [A] US 2002076642 A1 20020620 - ZAMPINI ANTHONY [US], et al
- See references of WO 2004007192A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
AU 2002329596 A1 20040202; EP 1521797 A1 20050413; EP 1521797 A4 20061220; JP 2005520354 A 20050707; JP 4336310 B2 20090930
DOCDB simple family (application)
AU 2002329596 A 20020711; EP 02765835 A 20020711; JP 2004521395 A 20020711