EP 1523671 A2 20050420 - METHOD AND APPARATUS FOR MEASURING CRITICAL DIMENSIONS WITH A PARTICLE BEAM
Title (en)
METHOD AND APPARATUS FOR MEASURING CRITICAL DIMENSIONS WITH A PARTICLE BEAM
Title (de)
VORRICHTUNG UND VERFAHREN ZUR MESSUNG KRITISCHER ABMESSUNGEN MITTELS EINES TEILCHENSTRAHLS
Title (fr)
SYSTEME ET PROCEDE DE DETERMINATION D'UNE FORME EN COUPE D'UN ELEMENT STRUCTUREL POSSEDANT UNE COUPE SUBMICRONIQUE
Publication
Application
Priority
- US 0321690 W 20030711
- US 39486402 P 20020711
Abstract (en)
[origin: WO2004008255A2] A method and system for determining a cross sectional feature of a structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method includes: (a) determining a first traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and a first transverse section; (b) selecting, in response to a first parameter, whether to (i) determine a second traverse section cross sectional feature in response to the first traverse cross sectional feature, or (ii) to determine the second traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and the second transverse section; and (c) determining the second traverse section cross sectional feature in response to the selection.
IPC 1-7
IPC 8 full level
G01B 15/00 (2006.01); H01J 37/28 (2006.01); H01L 21/027 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP KR)
G01N 23/225 (2013.01 - KR); H01J 37/28 (2013.01 - EP); H01J 2237/2816 (2013.01 - EP)
Citation (search report)
See references of WO 2004008255A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004008255 A2 20040122; WO 2004008255 A3 20040610; WO 2004008255 A8 20040722; AU 2003263776 A1 20040202; AU 2003263776 A8 20040202; CN 1668915 A 20050914; CN 1668915 B 20110615; EP 1523671 A2 20050420; JP 2005533252 A 20051104; JP 4493495 B2 20100630; KR 101057554 B1 20110817; KR 20060084787 A 20060725
DOCDB simple family (application)
US 0321690 W 20030711; AU 2003263776 A 20030711; CN 03816419 A 20030711; EP 03764488 A 20030711; JP 2004521664 A 20030711; KR 20057000440 A 20030711