EP 1523697 A2 20050420 - METHOD FOR THE PRODUCTION OF PHOTORESIST STRUCTURES
Title (en)
METHOD FOR THE PRODUCTION OF PHOTORESIST STRUCTURES
Title (de)
VERFAHREN ZUR HERSTELLUNG VON PHOTOLACKSTRUKTUREN
Title (fr)
PROCEDE DE PRODUCTION DE STRUCTURE DE LAQUE PHOTOSENSIBLE
Publication
Application
Priority
- DE 10233309 A 20020722
- EP 0307819 W 20030718
Abstract (en)
[origin: WO2004010222A2] The invention relates to a method for producing a large variety of photoresist structures, according to which a volume of photosensitive material (5) is exposed at least once by means of at least two light beams (1, 2) which overlap within the volume of photosensitive material (5) and is then subjected to a development process, the light beams (1, 2) penetrating at least one transparent optical element (3). Said optical element (3) is embodied as a polyhedron which has planar or curved surfaces and largely prevents the light beams from refracting on the surface of the volume of photosensitive material (5) such that the angle of refraction of the light beams (1, 2) can be greater in the volume of photosensitive material (5) than the critical angle of the total reflection, which has a limiting effect without the optical element (3).
IPC 1-7
IPC 8 full level
G02B 5/18 (2006.01); G02B 6/122 (2006.01); G03F 7/20 (2006.01); G03F 7/26 (2006.01); G03H 1/02 (2006.01); G03H 1/04 (2006.01); H01L 21/027 (2006.01); G02B 6/12 (2006.01)
CPC (source: EP US)
B82Y 20/00 (2013.01 - EP US); G02B 6/1225 (2013.01 - EP US); G03F 7/70216 (2013.01 - EP US); G02B 2006/12107 (2013.01 - EP US); G02B 2006/12173 (2013.01 - EP US); G03H 2223/25 (2013.01 - EP US); G03H 2250/12 (2013.01 - EP US)
Citation (search report)
See references of WO 2004010222A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004010222 A2 20040129; WO 2004010222 A3 20041014; AT E380359 T1 20071215; DE 10332651 A1 20040226; DE 50308738 D1 20080117; EP 1523697 A2 20050420; EP 1523697 B1 20071205; JP 2005534050 A 20051110; US 2006154178 A1 20060713; US 7407737 B2 20080805
DOCDB simple family (application)
EP 0307819 W 20030718; AT 03765041 T 20030718; DE 10332651 A 20030718; DE 50308738 T 20030718; EP 03765041 A 20030718; JP 2004522501 A 20030718; US 52216205 A 20050927