EP 1525334 A1 20050427 - METHOD AND ARRAY FOR PROCESSING CARRIER MATERIALS BY MEANS OF HEAVY ION RADIATION AND SUBSEQUENT ETCHING
Title (en)
METHOD AND ARRAY FOR PROCESSING CARRIER MATERIALS BY MEANS OF HEAVY ION RADIATION AND SUBSEQUENT ETCHING
Title (de)
VERFAHREN UND ANORDNUNG ZUR BEARBEITUNG VON TRÄGERMATERIAL DURCH SCHWERIONENBESTRAHLUNG UND NACHFOLGENDEN ÄTZPROZESS
Title (fr)
PROCEDE ET SYSTEME POUR TRAITER UN MATERIAU SUPPORT PAR IRRADIATION AUX IONS LOURDS ET GRAVURE SUCCESSIVE
Publication
Application
Priority
- DE 0302533 W 20030723
- DE 10234614 A 20020724
Abstract (en)
[origin: WO2004015161A1] The invention relates to a method and an array for processing carrier materials by means of heavy ion radiation and subsequent etching, wherein the heavy ion radiation is carried out in such a way that a ray beam (1) of an energy-rich heavy ion radiation (1.1) incides on the surface (2) of a carrier material in at least two different angles. According to the invention, the fluence, the energy and the direction of incidence of the heavy ion rays (1.1) are selected in such a way that a maximum amount of intersecting or coinciding latent ion traces (3) and common numbers of incisions of the recesses (4) resulting from a chemical etching process following heavy ion radiation are obtained.
IPC 1-7
C23C 14/02; B32B 31/00; H01G 9/04; B26F 1/26; H01J 37/31; B29C 59/16
IPC 8 full level
B01D 67/00 (2006.01); B26F 1/26 (2006.01); B29C 59/16 (2006.01); C23C 14/02 (2006.01); H01G 11/86 (2013.01); H05K 3/38 (2006.01)
CPC (source: EP US)
B01D 67/0032 (2013.01 - EP US); B01D 71/481 (2022.08 - EP US); B26F 1/26 (2013.01 - EP US); B29C 59/16 (2013.01 - EP US); B32B 38/0008 (2013.01 - EP US); C23C 14/022 (2013.01 - EP US); H01G 9/055 (2013.01 - EP); H01G 11/22 (2013.01 - US); H01G 11/70 (2013.01 - EP US); H01G 11/86 (2013.01 - EP US); B01D 2323/34 (2013.01 - EP US); H01G 11/28 (2013.01 - EP US); H05K 3/381 (2013.01 - EP US); Y02E 60/13 (2013.01 - US)
Citation (search report)
See references of WO 2004015161A1
Citation (examination)
- US 4855049 A 19890808 - TOULEMONDE MARCEL [FR], et al
- US 4832997 A 19890523 - BALANZAT EMMANUEL [FR], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004015161 A1 20040219; AU 2003258471 A1 20040225; AU 2003258471 A8 20040225; DE 10234614 B3 20040304; EP 1525334 A1 20050427; US 2005230353 A1 20051020
DOCDB simple family (application)
DE 0302533 W 20030723; AU 2003258471 A 20030723; DE 10234614 A 20020724; EP 03783928 A 20030723; US 52036605 A 20050106