EP 1532225 A1 20050525 - ETCHING PASTES FOR TITANIUM OXIDE SURFACES
Title (en)
ETCHING PASTES FOR TITANIUM OXIDE SURFACES
Title (de)
ÄTZPASTEN FÜR TITANOXID-OBERFLÄCHEN
Title (fr)
PATES D'ATTAQUE CHIMIQUE POUR SURFACES EN OXYDE DE TITANE
Publication
Application
Priority
- DE 10239656 A 20020826
- EP 0308395 W 20030730
Abstract (en)
[origin: WO2004020551A1] The invention relates to novel etching media in the form of printable and dispensable etching pastes for etching titanium oxide surfaces of general composition TixOy, and to the use of said etching pastes in a method for etching titanium oxide surfaces.
IPC 1-7
IPC 8 full level
C01G 23/04 (2006.01); C03C 15/00 (2006.01); C09K 13/08 (2006.01); H01L 21/308 (2006.01)
CPC (source: EP KR US)
C03C 15/00 (2013.01 - EP US); C09K 13/08 (2013.01 - EP KR US); H01L 31/02168 (2013.01 - EP US); H01L 31/18 (2013.01 - EP US); Y02E 10/50 (2013.01 - US)
Citation (search report)
See references of WO 2004020551A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004020551 A1 20040311; AU 2003255325 A1 20040319; CN 1678714 A 20051005; DE 10239656 A1 20040311; EP 1532225 A1 20050525; JP 2005536614 A 20051202; KR 20050058410 A 20050616; TW 200407463 A 20040516; US 2006118759 A1 20060608
DOCDB simple family (application)
EP 0308395 W 20030730; AU 2003255325 A 20030730; CN 03820081 A 20030730; DE 10239656 A 20020826; EP 03790830 A 20030730; JP 2004531831 A 20030730; KR 20057002920 A 20050221; TW 92123222 A 20030822; US 52484705 A 20050218