EP 1532485 A2 20050525 - DEVICE FOR SEALING A PROJECTION ILLUMINATION SYSTEM
Title (en)
DEVICE FOR SEALING A PROJECTION ILLUMINATION SYSTEM
Title (de)
VORRICHTUNG ZUM ABDICHTEN EINER PROJEKTIONSBELICHTUNGSANLAGE
Title (fr)
DISPOSITIF POUR RENDRE ETANCHE UN DISPOSITIF D'ECLAIRAGE PAR PROJECTION
Publication
Application
Priority
- DE 10239344 A 20020828
- EP 0309427 W 20030826
Abstract (en)
[origin: DE10239344A1] A light projection unit (1) comprises an illumination system (3), a reticule (5) a projection objective (7) and an image plane with intermediate spaces open to the surroundings between the elements. A gas distribution unit (8) flows noble gas or nitrogen into at least one space to seal spaces against the surroundings.
IPC 1-7
IPC 8 full level
G03B 27/52 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP KR US)
G03B 27/52 (2013.01 - EP US); G03F 7/00 (2013.01 - KR); G03F 7/20 (2013.01 - KR); G03F 7/70808 (2013.01 - EP US); G03F 7/70933 (2013.01 - EP US)
Citation (search report)
See references of WO 2004025368A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 10239344 A1 20040311; AU 2003273394 A1 20040430; CN 1695094 A 20051109; EP 1532485 A2 20050525; JP 2006515954 A 20060608; KR 20050044800 A 20050512; US 2005206860 A1 20050922; US 7130017 B2 20061031; WO 2004025368 A2 20040325; WO 2004025368 A3 20040923
DOCDB simple family (application)
DE 10239344 A 20020828; AU 2003273394 A 20030826; CN 03824720 A 20030826; EP 0309427 W 20030826; EP 03755549 A 20030826; JP 2004535162 A 20030826; KR 20057003399 A 20050226; US 6731505 A 20050225