Global Patent Index - EP 1532485 A2

EP 1532485 A2 20050525 - DEVICE FOR SEALING A PROJECTION ILLUMINATION SYSTEM

Title (en)

DEVICE FOR SEALING A PROJECTION ILLUMINATION SYSTEM

Title (de)

VORRICHTUNG ZUM ABDICHTEN EINER PROJEKTIONSBELICHTUNGSANLAGE

Title (fr)

DISPOSITIF POUR RENDRE ETANCHE UN DISPOSITIF D'ECLAIRAGE PAR PROJECTION

Publication

EP 1532485 A2 20050525 (DE)

Application

EP 03755549 A 20030826

Priority

  • DE 10239344 A 20020828
  • EP 0309427 W 20030826

Abstract (en)

[origin: DE10239344A1] A light projection unit (1) comprises an illumination system (3), a reticule (5) a projection objective (7) and an image plane with intermediate spaces open to the surroundings between the elements. A gas distribution unit (8) flows noble gas or nitrogen into at least one space to seal spaces against the surroundings.

IPC 1-7

G03F 7/00

IPC 8 full level

G03B 27/52 (2006.01); G03F 7/20 (2006.01)

CPC (source: EP KR US)

G03B 27/52 (2013.01 - EP US); G03F 7/00 (2013.01 - KR); G03F 7/20 (2013.01 - KR); G03F 7/70808 (2013.01 - EP US); G03F 7/70933 (2013.01 - EP US)

Citation (search report)

See references of WO 2004025368A2

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DOCDB simple family (publication)

DE 10239344 A1 20040311; AU 2003273394 A1 20040430; CN 1695094 A 20051109; EP 1532485 A2 20050525; JP 2006515954 A 20060608; KR 20050044800 A 20050512; US 2005206860 A1 20050922; US 7130017 B2 20061031; WO 2004025368 A2 20040325; WO 2004025368 A3 20040923

DOCDB simple family (application)

DE 10239344 A 20020828; AU 2003273394 A 20030826; CN 03824720 A 20030826; EP 0309427 W 20030826; EP 03755549 A 20030826; JP 2004535162 A 20030826; KR 20057003399 A 20050226; US 6731505 A 20050225