EP 1535307 B1 20130619 - DISCHARGE RADIATION SOURCE, IN PARTICULAR UV RADIATION
Title (en)
DISCHARGE RADIATION SOURCE, IN PARTICULAR UV RADIATION
Title (de)
ENTLADUNGSSTRAHLUNGSQUELLE INSBESONDERE FÜR UV-STRAHLUNG
Title (fr)
SOURCE DE RAYONNEMENT, NOTAMMENT ULTRAVIOLET, A DECHARGES
Publication
Application
Priority
- FR 0302002 W 20030627
- FR 0208149 A 20020628
Abstract (en)
[origin: WO2004003964A2] The invention concerns a radiation source, comprising an anode (2), a cathode (3), an electric discharge gap (4) between the anode (2) and the cathode (3) and a gas input conduit (30) in the discharge gap (4). The gas input conduit (30) is electrically connected to the anode and the cathode. The invention is characterized in that the gas input conduit (30) is supplied with gas by a gas supply conduit (32), designed to form between its portion (42) connected to the gas input conduit (30) and another of its portions connected to a fixed potential, an electric impedance such that it counters the generation of electric discharges inside the gas input conduit (30).
IPC 8 full level
G21K 5/02 (2006.01); H01J 61/56 (2006.01); H01J 61/52 (2006.01); H01L 21/027 (2006.01); H05H 1/24 (2006.01)
CPC (source: EP US)
H01J 61/526 (2013.01 - EP US); H01J 61/56 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2841684 A1 20040102; FR 2841684 B1 20040924; AU 2003258832 A1 20040119; AU 2003258832 A8 20040119; EP 1535307 A2 20050601; EP 1535307 B1 20130619; JP 2005531923 A 20051020; JP 4485943 B2 20100623; US 2005285048 A1 20051229; US 7420191 B2 20080902; WO 2004003964 A2 20040108; WO 2004003964 A3 20050310
DOCDB simple family (application)
FR 0208149 A 20020628; AU 2003258832 A 20030627; EP 03761657 A 20030627; FR 0302002 W 20030627; JP 2004516885 A 20030627; US 51955205 A 20050727