EP 1535348 A2 20050601 - METHOD FOR PRODUCING AN INTEGRATED PIN DIODE AND CORRESPONDING CIRCUIT
Title (en)
METHOD FOR PRODUCING AN INTEGRATED PIN DIODE AND CORRESPONDING CIRCUIT
Title (de)
VERFAHREN ZUM HERSTELLEN EINER INTEGRIERTEN PIN-DIODE UND ZUGEHÖRIGE SCHALTUNGSANORDNUNG
Title (fr)
PROCEDE DE PRODUCTION D'UNE DIODE PIN INTEGREE ET CIRCUIT ASSOCIE
Publication
Application
Priority
- DE 0302740 W 20030814
- DE 10241156 A 20020905
Abstract (en)
[origin: WO2004025739A2] The invention relates to, inter alia, a method for producing an integrated PIN photodiode comprising a buried region (20) and a connection region (32) which leads towards the buried region (20). Said method enables the PIN photodiode (14) to be integrated in a simple manner. Furthermore, process steps for producing said PIN diode can also be carried out for the production of screening troughs (22, 56).
IPC 1-7
IPC 8 full level
H01L 21/329 (2006.01); H01L 27/14 (2006.01); H01L 27/144 (2006.01); H01L 29/868 (2006.01); H01L 31/105 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP US)
H01L 27/144 (2013.01 - EP US); H01L 31/105 (2013.01 - EP US); H01L 31/18 (2013.01 - EP US)
Citation (search report)
See references of WO 2004025739A2
Designated contracting state (EPC)
DE FR IT
DOCDB simple family (publication)
WO 2004025739 A2 20040325; WO 2004025739 A3 20041223; CN 100492676 C 20090527; CN 1682380 A 20051012; DE 10241156 A1 20040318; EP 1535348 A2 20050601; JP 2006502566 A 20060119; JP 4344319 B2 20091014; TW 200405583 A 20040401; TW I247434 B 20060111; US 2006008933 A1 20060112; US 7297590 B2 20071120
DOCDB simple family (application)
DE 0302740 W 20030814; CN 03821213 A 20030814; DE 10241156 A 20020905; EP 03794789 A 20030814; JP 2004534972 A 20030814; TW 92120296 A 20030724; US 52681805 A 20050303