EP 1536140 A1 20050601 - Multistage dry vacuum pump
Title (en)
Multistage dry vacuum pump
Title (de)
Mehrstufige trockene Vakuumpumpe
Title (fr)
Pompe à vide sèche à étages multiples
Publication
Application
Priority
JP 2003397520 A 20031127
Abstract (en)
A multistage dry vacuum pump (1) includes a housing (2) having a series of pump chambers (8, 9, 10, 11), a rotor means (12a, 12b; 13a, 13b; 14a, 14b; 15a, 15b) provided in each pump chamber, a shaft (16a) connected to the rotor means and a rotation driving means (20) connected to the shaft. The multistage dry vacuum pump includes an intermediate exhaust conduit (30), one end thereof connected to the outlet of an intermediate pump chamber (10), being a pump chamber other than the most downstream pump chamber (11) and the other end thereof opened to outside and a first fluid flow control device (32) provided in the intermediate exhaust conduit for closing the same when fluid pressure at an outlet side of the intermediate pump chamber is lower than at the other end of the intermediate exhaust conduit, and for opening the same when fluid pressure at an outlet side of the intermediate pump chamber is higher than that at the other end of the intermediate exhaust conduit. <IMAGE>
IPC 1-7
IPC 8 full level
F04B 49/06 (2006.01); F04C 18/12 (2006.01); F04C 23/00 (2006.01); F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04C 28/26 (2006.01)
CPC (source: EP US)
F04C 18/126 (2013.01 - EP US); F04C 23/001 (2013.01 - EP US); F04C 25/02 (2013.01 - EP US); F04C 28/26 (2013.01 - EP US); F04C 2220/12 (2013.01 - EP US)
Citation (search report)
- [X] US 2003077182 A1 20030424 - NAITO YOSHIHIRO [JP], et al
- [X] AT 140808 B 19350225 - HEINL FRANZ DR ING
- [X] PATENT ABSTRACTS OF JAPAN vol. 012, no. 098 (M - 680) 31 March 1988 (1988-03-31)
- [X] PATENT ABSTRACTS OF JAPAN vol. 016, no. 212 (M - 1250) 19 May 1992 (1992-05-19)
- [X] PATENT ABSTRACTS OF JAPAN vol. 2000, no. 08 6 October 2000 (2000-10-06)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1536140 A1 20050601; CN 2809273 Y 20060823; JP 2005155540 A 20050616; US 2005118035 A1 20050602
DOCDB simple family (application)
EP 04078222 A 20041126; CN 200420115300 U 20041126; JP 2003397520 A 20031127; US 98866204 A 20041116