EP 1540714 A4 20071114 - BARRIER COATINGS PRODUCED BY ATMOSPHERIC GLOW DISCHARGE
Title (en)
BARRIER COATINGS PRODUCED BY ATMOSPHERIC GLOW DISCHARGE
Title (de)
DURCH ATMOSPHÄRISCHE GL HENTLADUNG ERZEUGTE BARRIERENBESCHICHTUNGEN
Title (fr)
REVETEMENT BARRIERE PRODUIT PAR DECHARGE LUMINESCENTE A LA PRESSION ATMOSPHERIQUE
Publication
Application
Priority
- US 0326363 W 20030822
- US 22835802 A 20020826
IPC 1-7
IPC 8 full level
C23C 16/505 (2006.01); C23C 16/509 (2006.01); H01L 21/20 (2006.01)
CPC (source: EP)
C23C 16/509 (2013.01)
Citation (search report)
- [AX] WO 0248428 A1 20020620 - KONISHIROKU PHOTO IND [JP], et al
- [X] US 5364665 A 19941115 - FELTS JOHN T [US], et al
- [A] DE 3522817 A1 19870102 - GRUENWALD HEINRICH DIPL CHEM [DE], et al & EP 1342810 A1 20030910 - KONISHIROKU PHOTO IND [JP]
- See references of WO 2004019381A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
AU 2003260000 A1 20040311; AU 2003260000 A8 20040311; CN 100380590 C 20080409; CN 1679142 A 20051005; EP 1540714 A2 20050615; EP 1540714 A4 20071114; JP 2005536635 A 20051202
DOCDB simple family (application)
AU 2003260000 A 20030822; CN 03820456 A 20030822; EP 03793301 A 20030822; JP 2004529864 A 20030822