EP 1543550 A2 20050622 - USER INTERFACE FOR QUANTIFYING WAFER NON-UNIFORMITIES AND GRAPHICALLY EXPLORE SIGNIFICANCE
Title (en)
USER INTERFACE FOR QUANTIFYING WAFER NON-UNIFORMITIES AND GRAPHICALLY EXPLORE SIGNIFICANCE
Title (de)
BENUTZEROBERFLÄCHE ZUR QUANTIFIZIERUNG VON SCHEIBENUNREGELMÄSSIGKEITEN UND GRAPHISCHE UNTERSUCHUNGSSIGNIFIKANZ
Title (fr)
INTERFACE UTILISATEUR PERMETTANT DE QUANTIFIER LES ASPECTS NON UNIFORMES D'UNE PLAQUETTE ET D'EXPLORER GRAPHIQUEMENT LEUR SIGNIFICATION
Publication
Application
Priority
- US 0330456 W 20030924
- US 41402102 P 20020926
- US 33119402 A 20021224
- US 45224803 A 20030530
Abstract (en)
[origin: WO2004030083A2] A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis.
IPC 1-7
IPC 8 full level
H01L 21/66 (2006.01)
CPC (source: EP KR)
H01L 22/00 (2013.01 - KR); H01L 22/20 (2013.01 - EP)
Citation (search report)
See references of WO 2004030083A2
Designated contracting state (EPC)
DE FR IT NL
DOCDB simple family (publication)
WO 2004030083 A2 20040408; WO 2004030083 A3 20040715; AU 2003299056 A1 20040419; EP 1543550 A2 20050622; JP 2006515468 A 20060525; KR 101127779 B1 20120327; KR 20050084603 A 20050826; TW 200414395 A 20040801; TW I229914 B 20050321
DOCDB simple family (application)
US 0330456 W 20030924; AU 2003299056 A 20030924; EP 03756878 A 20030924; JP 2005501992 A 20030924; KR 20057005323 A 20030924; TW 92126645 A 20030926