EP 1545836 A1 20050629 - RETAINING RING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE
Title (en)
RETAINING RING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE
Title (de)
HALTERING ZUM HALTEN VON HALBLEITERWAFERN IN EINER CHEMISCH-MECHANISCHEN POLIERVORRICHTUNG
Title (fr)
ANNEAU DE FIXATION DE PLAQUETTES EN SEMICONDUCTEURS DANS UN DISPOSITIF DE POLISSAGE PAR VOIE CHIMIQUE-MECANIQUE
Publication
Application
Priority
- DE 10247179 A 20021002
- EP 0310869 W 20031001
Abstract (en)
[origin: US2004065412A1] A retaining ring to be fitted on a chemical mechanical polishing apparatus for semiconductor wafers is disclosed, the retaining ring comprising a carrier ring made of a first material and having fitting elements for fitting the carrier ring on the polishing apparatus; and a bearing ring comprising a plastic material, arranged concentrically on the carrier ring, the bearing ring resting with a first front side on a polishing surface of the polishing apparatus and being held on its side axially opposed to the first front side releasably, non-rotatably, with a positive and/or frictional connection and without adhesive on the carrier ring; wherein the first material has a higher rigidity than the plastic material of the bearing ring.
IPC 1-7
IPC 8 full level
B24B 37/32 (2012.01); B24B 47/02 (2006.01); H01L 21/302 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP KR US)
B24B 37/32 (2013.01 - EP US); H01L 21/304 (2013.01 - KR)
Citation (search report)
See references of WO 2004033151A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2004065412 A1 20040408; US 6913669 B2 20050705; AU 2003273931 A1 20040504; CN 1694784 A 20051109; DE 10247179 A1 20040415; EP 1545836 A1 20050629; JP 2006502016 A 20060119; KR 20050067148 A 20050630; TW 200531782 A 20051001; WO 2004033151 A1 20040422
DOCDB simple family (application)
US 32242702 A 20021219; AU 2003273931 A 20031001; CN 200380100808 A 20031001; DE 10247179 A 20021002; EP 0310869 W 20031001; EP 03757898 A 20031001; JP 2004542393 A 20031001; KR 20057004367 A 20050314; TW 93108854 A 20040331