EP 1546027 A2 20050629 - METHOD AND MICROMECHANICAL COMPONENT
Title (en)
METHOD AND MICROMECHANICAL COMPONENT
Title (de)
VERFAHREN UND MIKROMECHANISCHES BAUELEMENT
Title (fr)
PROCEDE ET COMPOSANT MICROMECANIQUE
Publication
Application
Priority
- DE 0300630 W 20030227
- DE 10244785 A 20020926
Abstract (en)
[origin: WO2004028956A2] Disclosed are a production method and a micromechanical component, in which porous silicon (106) is used as a sacrificial layer and a functional layer (130) is exposed by etching away the sacrificial layer.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01)
CPC (source: EP US)
B81C 1/00476 (2013.01 - EP US); B81B 2201/12 (2013.01 - EP US); B81B 2203/0118 (2013.01 - EP US); B81C 2201/0109 (2013.01 - EP US); B81C 2201/0115 (2013.01 - EP US)
Citation (search report)
See references of WO 2004028956A2
Designated contracting state (EPC)
CH DE FR GB LI
DOCDB simple family (publication)
WO 2004028956 A2 20040408; WO 2004028956 A3 20041223; DE 10244785 A1 20040408; EP 1546027 A2 20050629; JP 2006500232 A 20060105; US 2006037932 A1 20060223
DOCDB simple family (application)
DE 0300630 W 20030227; DE 10244785 A 20020926; EP 03717116 A 20030227; JP 2004538667 A 20030227; US 52942505 A 20050916