EP 1546028 B8 20120523 - METHOD FOR SELECTIVELY COVERING A MICRO MACHINED SURFACE
Title (en)
METHOD FOR SELECTIVELY COVERING A MICRO MACHINED SURFACE
Title (de)
VERFAHREN ZUM SELEKTIVEN ABDECKEN EINER MIKROBEARBEITETEN OBERFLÄCHE
Title (fr)
PROCEDE DE RECOUVREMENT SELECTIF D'UNE SURFACE MICRO-USINEE
Publication
Application
Priority
- IT 0300545 W 20030911
- IT TO20020793 A 20020912
Abstract (en)
[origin: US7255799B2] On a die that has etchings on a surface, firstly a sheet of negative photoresist is laid down which, by means of an exposure and subsequent development, is left only above the etchings; then, upon the negative photoresist, a positive photoresist is applied, which is subjected to exposure and development to produce functional geometries deposited in thin film; subsequently the positive photoresist is removed in a "lift-off" operation, and the negative photoresist is taken off in a plasma operation, thus revealing the etchings.
IPC 8 full level
B81B 3/00 (2006.01); H01L 23/00 (2006.01); B81C 1/00 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR US)
B81C 1/00412 (2013.01 - EP KR US); G03F 7/0035 (2013.01 - KR); H01L 21/02107 (2013.01 - KR); H01L 21/0272 (2013.01 - KR)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004025726 A2 20040325; WO 2004025726 A3 20050428; AT E553063 T1 20120415; AU 2003265164 A1 20040430; AU 2003265164 B2 20100603; BR 0314276 A 20050719; CA 2498669 A1 20040325; CA 2498669 C 20130219; CN 100439233 C 20081203; CN 1688504 A 20051026; EP 1546028 A2 20050629; EP 1546028 B1 20120411; EP 1546028 B8 20120523; IT TO20020793 A1 20040313; JP 2005539379 A 20051222; JP 4559859 B2 20101013; KR 100997940 B1 20101202; KR 20050047113 A 20050519; RU 2005110686 A 20050910; RU 2334304 C2 20080920; US 2005224453 A1 20051013; US 7255799 B2 20070814
DOCDB simple family (application)
IT 0300545 W 20030911; AT 03795198 T 20030911; AU 2003265164 A 20030911; BR 0314276 A 20030911; CA 2498669 A 20030911; CN 03824005 A 20030911; EP 03795198 A 20030911; IT TO20020793 A 20020912; JP 2004535827 A 20030911; KR 20057004246 A 20030911; RU 2005110686 A 20030911; US 52767005 A 20050311