EP 1549586 A1 20050706 - MICROMECHANICAL COMPONENT AND METHOD
Title (en)
MICROMECHANICAL COMPONENT AND METHOD
Title (de)
MIKROMECHANISCHES BAUELEMENT UND VERFAHREN
Title (fr)
COMPOSANT MICROMECANIQUE ET PROCEDE CORRESPONDANT
Publication
Application
Priority
- DE 0300703 W 20030306
- DE 10244786 A 20020926
Abstract (en)
[origin: WO2004028957A1] Disclosed are a micromechanical component and a method for producing a micromechanical component, in which a hollow space (10) and an area made of porous silicon (11) are provided, said area made of porous silicon (11) being used for lowering the pressure in the hollow space (10).
IPC 1-7
IPC 8 full level
B81B 7/00 (2006.01)
CPC (source: EP US)
B81B 7/0038 (2013.01 - EP US); B81C 2201/0115 (2013.01 - EP US)
Citation (search report)
See references of WO 2004028957A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 2004028957 A1 20040408; DE 10244786 A1 20040408; EP 1549586 A1 20050706; JP 2006500233 A 20060105; US 2006137460 A1 20060629; US 7404332 B2 20080729
DOCDB simple family (application)
DE 0300703 W 20030306; DE 10244786 A 20020926; EP 03718615 A 20030306; JP 2004538669 A 20030306; US 52942005 A 20051129