EP 1549990 A1 20050706 - CORRECTED MICROSCOPE AND METHOD FOR CORRECTING THE XYZ DRIFT CAUSED BY TEMPERATURE CHANGE
Title (en)
CORRECTED MICROSCOPE AND METHOD FOR CORRECTING THE XYZ DRIFT CAUSED BY TEMPERATURE CHANGE
Title (de)
MIKROSKOP MIT KORREKTUR UND VERFAHREN ZUR KORREKTUR DER DURCH TEMPERATURÄNDERUNG HERVORGERUFENEN XYZ-DRIFT
Title (fr)
MICROSCOPE A CORRECTION ET PROCEDE POUR CORRIGER LA DERIVE XYZ PROVOQUEE PAR UNE VARIATION DE TEMPERATURE
Publication
Application
Priority
- DE 10246274 A 20021002
- EP 0350675 W 20031001
Abstract (en)
[origin: WO2004034124A1] Disclosed is a microscope (2) provided with a stand (12), a microscope stage (18) which is arranged on the stand (12) and which can be adjusted by a motor in all three spatial directions. At least one temperature sensor (30) and a command/control unit (10) are provided. The command/control unit (10) consists of a memory (9) and a microprocessor (11). A correction table (44) is stored in the memory, containing drift values for the three spatial directions (X, X and Z) as a function of temperature.
IPC 1-7
IPC 8 full level
G02B 21/24 (2006.01); G02B 21/26 (2006.01); G02B 21/36 (2006.01)
CPC (source: EP US)
G02B 21/245 (2013.01 - EP US); G02B 21/26 (2013.01 - EP US); G02B 21/365 (2013.01 - EP US)
Citation (search report)
See references of WO 2004034124A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004034124 A1 20040422; DE 10246274 A1 20040415; DE 10246274 B4 20060601; EP 1549990 A1 20050706; US 2006028716 A1 20060209
DOCDB simple family (application)
EP 0350675 W 20031001; DE 10246274 A 20021002; EP 03769504 A 20031001; US 52998705 A 20050331