EP 1558425 A2 20050803 - DEVICE AND METHOD FOR CONNECTING OBJECTS
Title (en)
DEVICE AND METHOD FOR CONNECTING OBJECTS
Title (de)
VORRICHTUNG UND VERFAHREN FÜR DAS VERBINDEN VON OBJEKTEN
Title (fr)
PROCEDE ET DISPOSITIF POUR RELIER DES OBJETS
Publication
Application
Priority
- DE 10242402 A 20020912
- EP 0310178 W 20030912
Abstract (en)
[origin: WO2004026531A2] A device and method for connecting at least a first object and a second object are disclosed, whereby a vacuum chamber is arranged around the objects for connection, the dimensions of which are determined from the dimensions of the objects such that the chamber can be rapidly evacuated. The objects are pressed together by atmospheric pressure for the connection thereof. The objects can additionally be pressed against each other in a controlled manner.
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01)
CPC (source: EP)
H01L 21/67092 (2013.01); H01L 21/67132 (2013.01); H01L 24/75 (2013.01); H01L 24/94 (2013.01); H01L 2224/8385 (2013.01); H01L 2224/94 (2013.01)
Citation (search report)
See references of WO 2004026531A2
Designated contracting state (EPC)
DE
DOCDB simple family (publication)
WO 2004026531 A2 20040401; WO 2004026531 A3 20040527; AU 2003280332 A1 20040408; AU 2003280332 A8 20040408; DE 10242402 A1 20040401; EP 1558425 A2 20050803
DOCDB simple family (application)
EP 0310178 W 20030912; AU 2003280332 A 20030912; DE 10242402 A 20020912; EP 03770941 A 20030912