EP 1560786 A1 20050810 - PULSED ION BEAM CONTROL OF SOLID STATE FEATURES
Title (en)
PULSED ION BEAM CONTROL OF SOLID STATE FEATURES
Title (de)
MIT GEPULSTEM IONENSTRAHL KONTROLLE VON FESTKÖRPERMERKMALEN
Title (fr)
CONTROLE DE CARACTERES SOLIDES PAR FAISCEAU IONIQUE A IMPULSIONS
Publication
Application
Priority
- US 0334192 W 20031028
- US 42190802 P 20021029
Abstract (en)
[origin: WO2005000732A1] For controlling a physical dimension of a solid state structural feature, a solid state structure is provided, having a surface and having a structural feature. The structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux of ions having a second exposure duty cycle characterized by a second ion exposure duration and a second nonexposure duration that is greater than the first nonexposure duration, for the second duty cycle, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.
IPC 1-7
IPC 8 full level
B81B 1/00 (2006.01); B81C 99/00 (2010.01)
CPC (source: EP)
B81C 1/00626 (2013.01); B81C 99/004 (2013.01); G01N 33/48721 (2013.01)
Citation (search report)
See references of WO 2005000732A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2005000732 A1 20050106; AU 2003304247 A1 20050113; EP 1560786 A1 20050810; JP 2006509645 A 20060323
DOCDB simple family (application)
US 0334192 W 20031028; AU 2003304247 A 20031028; EP 03816305 A 20031028; JP 2005503263 A 20031028