EP 1568068 A1 20050831 - BACKSIDE HEATING CHAMBER FOR EMISSIVITY INDEPENDENT THERMAL PROCESSES
Title (en)
BACKSIDE HEATING CHAMBER FOR EMISSIVITY INDEPENDENT THERMAL PROCESSES
Title (de)
RÜCKSEITENHEIZKAMMER
Title (fr)
ENCEINTE DE CHAUFFAGE ARRIERE
Publication
Application
Priority
US 0237752 W 20021122
Abstract (en)
[origin: WO2004049405A1] An apparatus that includes a reflector having a mirrored surface facing down, a glass structure located beneath the reflector, a susceptor within the glass structure having a surface facing up that is capable of holding a part to be processed, and one or more radiant heat sources directed at and located beneath the glass structure.
IPC 1-7
IPC 8 full level
C23C 16/48 (2006.01); C23C 16/52 (2006.01); C30B 25/10 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01); H05B 3/00 (2006.01)
CPC (source: EP KR)
C23C 16/481 (2013.01 - EP KR); C23C 16/52 (2013.01 - EP KR); C30B 25/10 (2013.01 - EP KR); H01L 21/67115 (2013.01 - EP KR); H01L 21/67248 (2013.01 - EP KR); H05B 3/0047 (2013.01 - EP KR)
Citation (search report)
See references of WO 2004049405A1
Designated contracting state (EPC)
DE NL
DOCDB simple family (publication)
WO 2004049405 A1 20040610; CN 1695228 A 20051109; EP 1568068 A1 20050831; JP 2006507680 A 20060302; JP 4640938 B2 20110302; KR 100930148 B1 20091208; KR 20050091707 A 20050915
DOCDB simple family (application)
US 0237752 W 20021122; CN 02829943 A 20021122; EP 02792298 A 20021122; JP 2004555232 A 20021122; KR 20057009023 A 20021122