EP 1568072 A1 20050831 - METHOD OF PRODUCING AN N-TYPE DIAMOND WITH HIGH ELECTRICAL CONDUCTIVITY
Title (en)
METHOD OF PRODUCING AN N-TYPE DIAMOND WITH HIGH ELECTRICAL CONDUCTIVITY
Title (de)
VERFAHREN ZUR HERSTELLUNG VON N-TYP-DIAMANT MIT HOHER ELEKTRISCHER LEITFÄHIGKEIT
Title (fr)
PROCEDE D ELABORATION DE DIAMANT DE TYPE N A HAUTE CONDUCTIV ITE ELECTRIQUE
Publication
Application
Priority
- FR 0303592 W 20031204
- FR 0215453 A 20021206
Abstract (en)
[origin: FR2848335A1] The production of an n type diamond incorporates an n type doping stage, in which a donor species is made to diffuse under vacuum into a diamond initially doped with an acceptor, in order to form with it donor groups containing the donor species, at a temperature of less than or equal to the dissociation temperature for the complexes formed between the acceptor and the donor species. An Independent claim is also included for n type diamond doped with hydrogen and boron and possessing a conductivity at 300 K greater than or essentially equal to 1 OMEGA-1cm-1.
IPC 1-7
IPC 8 full level
C30B 31/00 (2006.01); C30B 31/06 (2006.01); H01L 21/04 (2006.01); H01L 21/223 (2006.01); H01L 21/205 (2006.01)
CPC (source: EP US)
C30B 29/04 (2013.01 - EP US); C30B 31/00 (2013.01 - EP US); C30B 31/06 (2013.01 - EP US); H01L 21/0405 (2013.01 - EP US); H01L 21/2236 (2013.01 - EP US); H01L 21/041 (2013.01 - EP US); Y10S 438/914 (2013.01 - EP US)
Citation (search report)
See references of WO 2004053960A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2848335 A1 20040611; FR 2848335 B1 20051007; AU 2003298415 A1 20040630; AU 2003298415 A8 20040630; EP 1568072 A1 20050831; JP 2006508887 A 20060316; JP 4823523 B2 20111124; US 2005266606 A1 20051201; US 7368317 B2 20080506; WO 2004053960 A1 20040624
DOCDB simple family (application)
FR 0215453 A 20021206; AU 2003298415 A 20031204; EP 03796163 A 20031204; FR 0303592 W 20031204; JP 2004558172 A 20031204; US 14427905 A 20050603