EP 1568073 A1 20050831 - MANUFACTURING PROCESS FOR A MULTILAYER STRUCTURE
Title (en)
MANUFACTURING PROCESS FOR A MULTILAYER STRUCTURE
Title (de)
HERSTELLUNGSVERFAHREN FÜR MEHRSCHICHTENSTRUKTUR
Title (fr)
PROCEDE DE FABRICATION D'UNE STRUCTURE MULTICOUCHE
Publication
Application
Priority
- FR 0215499 A 20021206
- IB 0306397 W 20031205
Abstract (en)
[origin: FR2848334A1] The production of a multi-layer structure of semiconductor materials comprises: (a) the production of a layer (110) incorporating a superficial thin film on a support substrate (100); (b) the creation of a fragilisation (sic) zone in the assembly (10) formed by the support substrate and the thin film deposited; (c) the adhesion of the assembly with a target substrate (20); (d) the detachment at the level of the fragilisation zone; and (e) the treatment of the surface of the structure thus obtained.
IPC 1-7
IPC 8 full level
H01L 21/20 (2006.01); H01L 21/762 (2006.01)
CPC (source: EP KR)
H01L 21/20 (2013.01 - KR); H01L 21/76254 (2013.01 - EP); H01L 21/76259 (2013.01 - EP)
Citation (search report)
See references of WO 2004053961A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2848334 A1 20040611; AU 2003294170 A1 20040630; CN 1720605 A 20060111; EP 1568073 A1 20050831; JP 2006509361 A 20060316; JP 4762547 B2 20110831; KR 100797210 B1 20080122; KR 20050084146 A 20050826; TW 200511393 A 20050316; TW I289880 B 20071111; WO 2004053961 A1 20040624
DOCDB simple family (application)
FR 0215499 A 20021206; AU 2003294170 A 20031205; CN 200380105249 A 20031205; EP 03789590 A 20031205; IB 0306397 W 20031205; JP 2004558309 A 20031205; KR 20057010109 A 20050603; TW 92134368 A 20031205