EP 1570103 A1 20050907 - METHOD FOR THE VAPOUR DEPOSITION OF (A) COMPOUND(S) ON A SUPPORT
Title (en)
METHOD FOR THE VAPOUR DEPOSITION OF (A) COMPOUND(S) ON A SUPPORT
Title (de)
VERFAHREN ZUR AUFDAMPFUNG VON VERBINDUNG(EN) AUF EINEN TRÄGER
Title (fr)
PROCEDE DE METALLISATION SOUS VIDE DE COMPOSE(S) SUR UN SUPPORT
Publication
Application
Priority
- DE 10256850 A 20021204
- EP 0313466 W 20031128
Abstract (en)
[origin: WO2004050946A1] The invention relates to a method for the vapour deposition of (a) compound(s) on a support, characterised in that i) the compound is introduced into a carrier gas flow in the solid state, ii) the compound is transformed into the gaseous state in the carrier gas flow and iii) the gaseous compound is deposited on the support.
IPC 1-7
IPC 8 full level
C23C 14/12 (2006.01)
CPC (source: EP)
C23C 14/12 (2013.01)
Citation (search report)
See references of WO 2004050946A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004050946 A1 20040617; AU 2003288202 A1 20040623; DE 10256850 A1 20040624; EP 1570103 A1 20050907
DOCDB simple family (application)
EP 0313466 W 20031128; AU 2003288202 A 20031128; DE 10256850 A 20021204; EP 03780090 A 20031128