EP 1570507 A2 20050907 - GAS DISCHARGE LAMP FOR EUV RADIATION
Title (en)
GAS DISCHARGE LAMP FOR EUV RADIATION
Title (de)
GASENTLADUNGSLAMPE FÜR EUV-STRAHLUNG
Title (fr)
LAMPE A DECHARGE GAZEUSE POUR RAYONNEMENT UV EXTREME
Publication
Application
Priority
- DE 10256663 A 20021204
- IB 0305496 W 20031128
Abstract (en)
[origin: WO2004051698A2] The invention relates to a gas discharge lamp for EUV radiation, comprising an anode (1) and a hollow cathode (2). Said hollow cathode (2) is provided with at least two openings (3, 3') while the anode (1) is provided with a passage (4). The inventive gas discharge lamp is characterized by the fact that the longitudinal axes (5, 5') of the hollow cathode openings (3) have a common point of intersection S which is located on the axis of symmetry (6) of the anode passage (4).
IPC 1-7
IPC 8 full level
H01J 61/09 (2006.01); H05G 2/00 (2006.01)
CPC (source: EP US)
H01J 61/09 (2013.01 - EP US); H05G 2/003 (2013.01 - EP US)
Citation (search report)
See references of WO 2004051698A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004051698 A2 20040617; WO 2004051698 A3 20040910; WO 2004051698 A8 20101111; AU 2003302551 A1 20040623; AU 2003302551 A8 20101209; CN 100375219 C 20080312; CN 1720600 A 20060111; DE 10256663 B3 20051013; EP 1570507 A2 20050907; JP 2006509330 A 20060316; JP 4594101 B2 20101208; TW 200503045 A 20050116; US 2006138960 A1 20060629; US 7397190 B2 20080708
DOCDB simple family (application)
IB 0305496 W 20031128; AU 2003302551 A 20031128; CN 200380104994 A 20031128; DE 10256663 A 20021204; EP 03812235 A 20031128; JP 2004556668 A 20031128; TW 92133834 A 20031202; US 53691803 A 20031128