EP 1573400 A2 20050914 - METHOD FOR APPLYING A RESIST LAYER, USES OF ADHESIVE MATERIALS, AND ADHESIVE MATERIALS AND A RESIST LAYER

Title (en)

METHOD FOR APPLYING A RESIST LAYER, USES OF ADHESIVE MATERIALS, AND ADHESIVE MATERIALS AND A RESIST LAYER

Title (de)

VERFAHREN ZUM AUFBRINGEN EINER RESISTSCHICHT, VERWENDUNGEN VON KLEBEMATERIALIEN SOWIE KLEBEMATERIALIEN UND RESISTSCHICHT

Title (fr)

PROCEDE D'APPLICATION D'UNE COUCHE DE RESERVE, UTILISATIONS DE MATERIAUX ADHESIFS, ET MATERIAUX ADHESIFS ET COUCHE DE RESERVE CORRESPONDANTS

Publication

EP 1573400 A2 20050914 (DE)

Application

EP 03767816 A 20031218

Priority

DE 10260235 A 20021220
EP 0314460 W 20031218

Abstract (en)

[origin: WO2004059393A2] The invention relates to a method wherein a resist layer (12) is applied to a base layer (24). The resist layer (12) is made of an adhesive material, the adhesive force thereof either reducing or increasing during radiation. Removal of residue of the resist layer (12) is made easier due to said method.

IPC 1-7

G03F 7/16; G03F 7/34; G03F 7/32

IPC 8 full level

G03F 7/16 (2006.01); G03F 7/32 (2006.01); G03F 7/34 (2006.01)

CPC (source: EP US)

G03F 7/16 (2013.01 - EP US); G03F 7/161 (2013.01 - EP US); G03F 7/32 (2013.01 - EP US); G03F 7/34 (2013.01 - EP US)

Citation (search report)

See references of WO 2004059393A2

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DOCDB simple family (publication)

WO 2004059393 A2 20040715; WO 2004059393 A3 20050407; AU 2003292253 A1 20040722; AU 2003292253 A8 20040722; CN 1729430 A 20060201; DE 10260235 A1 20040722; DE 10260235 B4 20101028; EP 1573400 A2 20050914; JP 2006510064 A 20060323; TW 200413857 A 20040801; TW I233540 B 20050601; US 2005266353 A1 20051201; US 2008305428 A1 20081211; US 2011269073 A1 20111103; US 7351514 B2 20080401; US 8003292 B2 20110823; US 8415080 B2 20130409; US RE42980 E 20111129

DOCDB simple family (application)

EP 0314460 W 20031218; AU 2003292253 A 20031218; CN 200380106827 A 20031218; DE 10260235 A 20021220; EP 03767816 A 20031218; JP 2004562781 A 20031218; TW 92135306 A 20031212; US 15640505 A 20050620; US 201113178710 A 20110708; US 79815010 A 20100329; US 94314507 A 20071120