EP 1576292 B1 20080305 - VACUUM PUMPING ARRANGEMENT
Title (en)
VACUUM PUMPING ARRANGEMENT
Title (de)
VAKUUMPUMPE
Title (fr)
DISPOSITIF DE POMPAGE SOUS VIDE
Publication
Application
Priority
- GB 0305375 W 20031209
- GB 0229356 A 20021217
Abstract (en)
[origin: US2006140794A1] A vacuum pumping arrangement comprises a drive shaft, a motor for driving said drive shaft, a molecular pumping mechanism and a regenerative pumping mechanism. The drive shaft is arranged for simultaneously driving the molecular pumping mechanism and the regenerative pumping mechanism. The drive shaft is supported by a lubricant free bearing associated with the molecular pumping mechanism.
IPC 8 full level
F04D 27/00 (2006.01); F04D 19/04 (2006.01); F04D 23/00 (2006.01); F04D 27/02 (2006.01); F04D 29/04 (2006.01); F04D 29/058 (2006.01)
CPC (source: EP US)
F04D 17/168 (2013.01 - EP US); F04D 19/048 (2013.01 - EP US); F04D 23/008 (2013.01 - EP US); F04D 29/058 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004055376 A2 20040701; WO 2004055376 A3 20040805; AT E388328 T1 20080315; AU 2003295101 A1 20040709; DE 60319585 D1 20080417; DE 60319585 T2 20090326; EP 1576292 A2 20050921; EP 1576292 B1 20080305; GB 0229356 D0 20030122; JP 2006509952 A 20060323; TW 200417690 A 20040916; US 2006140794 A1 20060629
DOCDB simple family (application)
GB 0305375 W 20031209; AT 03786101 T 20031209; AU 2003295101 A 20031209; DE 60319585 T 20031209; EP 03786101 A 20031209; GB 0229356 A 20021217; JP 2004559873 A 20031209; TW 92135769 A 20031217; US 53677905 A 20051201