EP 1576338 B1 20060503 - OPTICAL METHOD OF EXAMINING RELIEFS ON A STRUCTURE
Title (en)
OPTICAL METHOD OF EXAMINING RELIEFS ON A STRUCTURE
Title (de)
OPTISCHES VERFAHREN ZUR UNTERSUCHUNG VON RELIEFS EINER STRUKTUR
Title (fr)
PROCEDE D'ETUDE DES RELIEFS D'UNE STRUCTURE PAR VOIE OPTIQUE
Publication
Application
Priority
- FR 0350198 W 20031222
- FR 0216526 A 20021223
Abstract (en)
[origin: FR2849181A1] Optical surface inspection method in which a measurement spectrum is obtained from a surface with relief structure and then compared with representative trial spectra for arbitrary structures that are adjusted in an iterative manner. A correlation of representative points of the spectra are selected and structure determination optimized by a hierarchical parameter adjustment.
IPC 8 full level
G01B 11/06 (2006.01); G01B 11/24 (2006.01)
CPC (source: EP US)
G01B 11/0625 (2013.01 - EP US); G01B 11/24 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2006103855 A1 20060518; US 7158239 B2 20070102; AT E325328 T1 20060615; DE 60305072 D1 20060608; DE 60305072 T2 20061123; EP 1576338 A2 20050921; EP 1576338 B1 20060503; FR 2849181 A1 20040625; FR 2849181 B1 20051223; JP 2006511799 A 20060406; WO 2004059246 A2 20040715; WO 2004059246 A3 20040819
DOCDB simple family (application)
US 53453405 A 20050512; AT 03810008 T 20031222; DE 60305072 T 20031222; EP 03810008 A 20031222; FR 0216526 A 20021223; FR 0350198 W 20031222; JP 2004563318 A 20031222