EP 1590828 A2 20051102 - IMPROVED MEGASONIC CLEANING EFFICIENCY USING AUTO- TUNING OF AN RF GENERATOR AT CONSTANT MAXIMUM EFFICIENCY
Title (en)
IMPROVED MEGASONIC CLEANING EFFICIENCY USING AUTO- TUNING OF AN RF GENERATOR AT CONSTANT MAXIMUM EFFICIENCY
Title (de)
VERBESSERTE MEGASCHALL-REINIGUNGSLEISTUNG MITTELS AUTOMATISCHER ABSTIMMUNG EINES HF-GENERATORS BEI KONSTANTER HÖCHSTLEISTUNG
Title (fr)
SYSTEME ET PROCEDE AMELIORES DE NETTOYAGE MEGASONIQUE UTILISANT UNE TECHNIQUE D'ACCORD AUTOMATIQUE PERMETTANT DE FAIRE FONCTIONNER UN GENERATEUR RF A UN RENDEMENT MAXIMAL CONSTANT
Publication
Application
Priority
- US 0341226 W 20031223
- US 36032203 A 20030206
- US 36032003 A 20030206
- US 36031603 A 20030206
- US 35976503 A 20030206
Abstract (en)
[origin: WO2004071938A2] system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer. The dynamically adjustable RF generator can be controlled by a phase comparison of an oscillator output voltage and a phase of an RF generator output voltage. The dynamically adjustable RF generator can also be controlled by monitoring a peak voltage of an output signal and controlling the RF generator to maintain the peak voltage within a predetermined voltage range. The dynamically adjustable RF generator can also be controlled by dynamically controlling a variable DC power supply voltage.
IPC 1-7
IPC 8 full level
B06B 1/02 (2006.01); B08B 3/10 (2006.01); B08B 3/12 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP KR)
B06B 1/0253 (2013.01 - EP); B08B 3/10 (2013.01 - EP); B08B 3/12 (2013.01 - EP); H01L 21/302 (2013.01 - KR); H01L 21/67057 (2013.01 - EP); H01L 21/67253 (2013.01 - EP); B06B 2201/71 (2013.01 - EP)
Citation (search report)
See references of WO 2004071938A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004071938 A2 20040826; WO 2004071938 A3 20041229; AU 2003299889 A1 20040906; AU 2003299889 A8 20040906; CN 100401479 C 20080709; CN 1759471 A 20060412; EP 1590828 A2 20051102; JP 2006513844 A 20060427; JP 4602773 B2 20101222; KR 101108901 B1 20120220; KR 20050097992 A 20051010; TW 200421713 A 20041016; TW I292985 B 20080121
DOCDB simple family (application)
US 0341226 W 20031223; AU 2003299889 A 20031223; CN 200380110213 A 20031223; EP 03800161 A 20031223; JP 2004568342 A 20031223; KR 20057014555 A 20031223; TW 92137672 A 20031231