EP 1592551 A4 20090513 - NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME
Title (en)
NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME
Title (de)
NANOSTOFFTEILCHEN UND HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
DISPOSITIFS COMPORTANT DES ARTICLES EN NANOTISSU DISPOSES A L'HORIZONTALE ET PROCEDES DE PRODUCTION CORRESPONDANTS
Publication
Application
Priority
- US 2004004106 W 20040212
- US 44678603 P 20030212
- US 44678303 P 20030212
Abstract (en)
[origin: WO2004072335A2] Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.
IPC 8 full level
B32B 7/00 (2006.01); B81B 3/00 (2006.01); G11C 13/02 (2006.01); G11C 23/00 (2006.01); H01H 59/00 (2006.01); H01L 27/10 (2006.01); H01L 29/73 (2006.01); H01L 47/00 (2006.01); H05K 1/03 (2006.01)
CPC (source: EP)
B81C 1/00142 (2013.01); B82Y 10/00 (2013.01); G11C 13/025 (2013.01); G11C 14/00 (2013.01); G11C 23/00 (2013.01); H01H 1/0094 (2013.01); B81B 2201/016 (2013.01); B81B 2203/0127 (2013.01); B81C 2201/0109 (2013.01); G11C 2213/16 (2013.01); G11C 2213/77 (2013.01); G11C 2213/81 (2013.01)
Citation (search report)
- [DXY] US 2003021966 A1 20030130 - SEGAL BRENT M [US], et al
- [Y] US 6445006 B1 20020903 - BRANDES GEORGE R [US], et al
- See references of WO 2004072334A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004072335 A2 20040826; WO 2004072335 A3 20050506; AT E472804 T1 20100715; CA 2515724 A1 20040826; CA 2515742 A1 20040826; DE 602004027887 D1 20100812; EP 1592551 A2 20051109; EP 1592551 A4 20090513; EP 1593164 A2 20051109; EP 1593164 A4 20090513; EP 1593164 B1 20100630; EP 2383749 A2 20111102; EP 2383749 A3 20121219; WO 2004072334 A2 20040826; WO 2004072334 A3 20050407
DOCDB simple family (application)
US 2004004107 W 20040212; AT 04710662 T 20040212; CA 2515724 A 20040212; CA 2515742 A 20040212; DE 602004027887 T 20040212; EP 04710626 A 20040212; EP 04710662 A 20040212; EP 11175921 A 20040212; US 2004004106 W 20040212