EP 1592643 A2 20051109 - MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH DEPOSIT OF GETTER MATERIAL AND INTEGRATED HEATER, AND SUPPORT FOR THE PRODUCTION THEREOF
Title (en)
MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH DEPOSIT OF GETTER MATERIAL AND INTEGRATED HEATER, AND SUPPORT FOR THE PRODUCTION THEREOF
Title (de)
MICROMECHANISCHE ODER MICROOPTOELEKTRONISCHE VORRICHTUNGEN MIT ABSCHEIDUNG VON GETTER-MATERIAL UND INTEGRIERTES HEIZGERÄT, UND BASIS FÜR DEREN HERSTELLUNGSVERFAHREN
Title (fr)
DISPOSITIFS MICRO-MECANIQUES OU MICRO-OPTICO ELECTRONIQUES AVEC DEPOT DE MATERIAU DE DEGAZAGE, CHAUFFAGE INTEGRE, ET SUPPORT DE PRODUCTION ASSOCIE
Publication
Application
Priority
- IT 0300857 W 20031224
- IT MI20030069 A 20030117
Abstract (en)
[origin: WO2004065289A2] Micromechanical (10; 20) or microoptoelectronic (30) devices are described which comprises a deposit of getter material (17; 25; 35) for the sorption of gases being detrimental to the operation of said devices and an integrated system (18, 18', 19, 19') for heating the getter material from the outside at each moment this is required during the life of the device. Various embodiments of a support for manufacturing these devices are also described.
IPC 1-7
IPC 8 full level
B81B 7/00 (2006.01)
CPC (source: EP KR)
B81B 7/00 (2013.01 - KR); B81B 7/0038 (2013.01 - EP)
Citation (search report)
See references of WO 2004065289A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004065289 A2 20040805; WO 2004065289 A3 20050106; AU 2003295223 A1 20040813; CA 2511836 A1 20040805; CN 100453442 C 20090121; CN 1738765 A 20060222; EP 1592643 A2 20051109; HK 1087090 A1 20061006; IT MI20030069 A1 20040718; JP 2006513046 A 20060420; KR 20050092426 A 20050921; MY 157923 A 20160815; NO 20053804 L 20050812; TW 200500291 A 20050101
DOCDB simple family (application)
IT 0300857 W 20031224; AU 2003295223 A 20031224; CA 2511836 A 20031224; CN 200380108858 A 20031224; EP 03786227 A 20031224; HK 06107278 A 20060628; IT MI20030069 A 20030117; JP 2004567099 A 20031224; KR 20057013228 A 20050716; MY PI20040115 A 20040115; NO 20053804 A 20050812; TW 93100361 A 20040107