EP 1594799 A2 20051116 - METHOD FOR PRODUCING A MICROMECHANICAL DEVICE AND A MICROMECHANICAL DEVICE
Title (en)
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE AND A MICROMECHANICAL DEVICE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER MIKROMECHANISCHEN VORRICHTUNG UND VORRICHTUNG
Title (fr)
PROCEDE POUR REALISER UN DISPOSITIF MICROMECANIQUE ET DISPOSITIF
Publication
Application
Priority
- DE 0303194 W 20030925
- DE 10305442 A 20030211
Abstract (en)
[origin: WO2004071941A2] The invention relates to a method for producing a micromechanical device and to corresponding micromechanical device consisting of a substrate material (10), a membrane (20) and a hollow space (30) formed in the region of membrane (21) between said substrate and membrane. According to said invention holes (40) are embodied first and foremost in the membrane (20) during a first etching stage and afterwards, the hollow space is produced during a second etching stage.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01)
CPC (source: EP US)
B81C 1/00047 (2013.01 - EP US); B81C 1/0069 (2013.01 - EP US); B81B 2203/0127 (2013.01 - EP US); B81C 2201/0109 (2013.01 - EP US)
Citation (search report)
See references of WO 2004071941A2
Designated contracting state (EPC)
DE FR IT
DOCDB simple family (publication)
WO 2004071941 A2 20040826; WO 2004071941 A3 20041223; DE 10305442 A1 20040819; EP 1594799 A2 20051116; JP 2006513047 A 20060420; US 2006226114 A1 20061012
DOCDB simple family (application)
DE 0303194 W 20030925; DE 10305442 A 20030211; EP 03815817 A 20030925; JP 2004568081 A 20030925; US 54335703 A 20030925