EP 1598933 B1 20090812 - Air-gap type thin-film bulk acoustic resonator and fabrication method therefor
Title (en)
Air-gap type thin-film bulk acoustic resonator and fabrication method therefor
Title (de)
Akustischer Dünnschicht-Volumenwellenresonator des Luftspalttyps und dessen Herstellungsverfahren
Title (fr)
Résonateur à ondes acoustiques de volume à couche mince du type air gap et son procédé de fabrication
Publication
Application
Priority
KR 20040034969 A 20040517
Abstract (en)
[origin: US2005253670A1] An air-gap type thin-film bulk acoustic resonator. The air-gap type thin-film bulk acoustic resonator has a substrate having a cavity formed on a predetermined portion of an upper surface thereof; a resonance part having a structure of a first electrode, a piezoelectric substance, and a second electrode deposited in order and formed over the upper side of the cavity; and at least one via hole penetrating a lower surface of the substrate and connecting to the cavity.
IPC 8 full level
H01L 41/09 (2006.01); H03H 9/17 (2006.01); H01L 41/187 (2006.01); H01L 41/22 (2013.01); H03H 3/02 (2006.01); H03H 9/24 (2006.01); H03H 9/56 (2006.01)
CPC (source: EP KR US)
H03H 3/02 (2013.01 - EP US); H03H 9/173 (2013.01 - EP US); H03H 9/24 (2013.01 - KR); H03H 2003/021 (2013.01 - EP US); Y10T 29/42 (2015.01 - EP US)
Designated contracting state (EPC)
DE FI FR GB SE
DOCDB simple family (publication)
US 2005253670 A1 20051117; US 7253705 B2 20070807; DE 602005015908 D1 20090924; EP 1598933 A1 20051123; EP 1598933 B1 20090812; JP 2005333642 A 20051202; KR 100631216 B1 20061004; KR 20050109870 A 20051122
DOCDB simple family (application)
US 13015705 A 20050517; DE 602005015908 T 20050517; EP 05253013 A 20050517; JP 2005143925 A 20050517; KR 20040034969 A 20040517