EP 1602121 B1 20120627 - APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS
Title (en)
APPARATUS FOR GENERATING A PLURALITY OF BEAMLETS
Title (de)
VORRICHTUNG ZUR ERZEUGUNG EINER VIELZAHL VON TEILSTRAHLEN
Title (fr)
DISPOSITIF SERVANT A GENERER UNE PLURALITE DE PETITS FAISCEAUX
Publication
Application
Priority
- NL 2004000174 W 20040310
- US 45374503 P 20030310
Abstract (en)
[origin: WO2004081910A2] The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means. In this way, it is possible to reduce aberrations of the converging means.
IPC 8 full level
H01J 37/317 (2006.01); H01J 3/02 (2006.01); H01J 3/07 (2006.01); H01J 3/14 (2006.01); H01J 3/26 (2006.01); H01J 37/063 (2006.01)
IPC 8 main group level
G09G (2006.01)
CPC (source: EP KR US)
B82Y 10/00 (2013.01 - EP US); B82Y 40/00 (2013.01 - EP US); H01J 3/07 (2013.01 - EP US); H01J 37/063 (2013.01 - EP US); H01J 37/12 (2013.01 - EP US); H01J 37/153 (2013.01 - EP US); H01J 37/317 (2013.01 - KR); H01J 37/3174 (2013.01 - EP US); H01J 37/3177 (2013.01 - EP US); H01J 2237/1205 (2013.01 - EP US); H01J 2237/151 (2013.01 - EP US); H01J 2237/1536 (2013.01 - EP US); H01J 2237/26 (2013.01 - EP US); H01J 2237/31774 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2004081910 A2 20040923; WO 2004081910 A3 20050331; CN 1759465 A 20060412; CN 1759465 B 20100616; EP 1602121 A2 20051207; EP 1602121 B1 20120627; EP 2503587 A2 20120926; EP 2503587 A3 20170823; JP 2006520078 A 20060831; JP 4484868 B2 20100616; KR 101068607 B1 20110930; KR 20050102688 A 20051026; US 2004232349 A1 20041125; US 2007018112 A1 20070125; US 2007029499 A1 20070208; US 2007029509 A1 20070208; US 2008073547 A1 20080327; US 7129502 B2 20061031; US 7348567 B1 20080325; US 7365338 B2 20080429; US 7391037 B2 20080624; US 7569833 B2 20090804
DOCDB simple family (application)
NL 2004000174 W 20040310; CN 200480006424 A 20040310; EP 04719157 A 20040310; EP 12172592 A 20040310; JP 2006507851 A 20040310; KR 20057016959 A 20040310; US 52720606 A 20060925; US 54498006 A 20061006; US 54597506 A 20061010; US 54597606 A 20061010; US 79736404 A 20040310